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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 6, 2009, Pages 1310-1315

Effects of pulsed sputtering frequency on the uniformity of Al:ZnOs transparent conductive oxide properties for solar cell applications

(2) Yang, Wonkyun a Joo, Junghoon a

a Kunsan National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AL-DOPED ZNO; AVERAGE VALUES; GLASS SLIDES; GLASS SUBSTRATES; NON-UNIFORMITIES; OPTICAL TRANSMITTANCE; PULSED DC POWER SUPPLY; PULSED MAGNETRON SPUTTERING; PULSED SPUTTERING; SOLAR CELL STRUCTURES; SOLAR-CELL APPLICATIONS; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE RANGE; WITNESS SAMPLE;

DEPOSITS; ELECTRIC RESISTANCE; GLASS; MAGNETRON SPUTTERING; SHEET RESISTANCE; SOLAR CELLS; ZINC OXIDE;

PHOTOVOLTAIC CELLS;

EID: 71049188085 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3242421 Document Type: Article

Times cited : (10)

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