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Volumn 107, Issue 12, 2010, Pages

Impact of oxygen on the permanent deactivation of boron-oxygen-related recombination centers in crystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

BORON-DOPED; BORON-OXYGEN; CRYSTALLINE SILICONS; CZOCHRALSKI; DEACTIVATION PROCESS; DEACTIVATION RATE; DEFECT REACTIONS; ELEVATED TEMPERATURE; INTERSTITIAL OXYGEN CONCENTRATION; LONG-TERM ANNEALING; RECOMBINATION CENTERS; THERMAL DONOR;

EID: 77954198407     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3431359     Document Type: Article
Times cited : (29)

References (16)
  • 1
    • 1442337113 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.69.024107
    • J. Schmidt and K. Bothe, Phys. Rev. B PRBMDO 0163-1829 69, 024107 (2004). 10.1103/PhysRevB.69.024107
    • (2004) Phys. Rev. B , vol.69 , pp. 024107
    • Schmidt, J.1    Bothe, K.2
  • 9
    • 0000108791 scopus 로고    scopus 로고
    • Record low surface recombination velocities on 1 cm p-silicon using remote plasma silicon nitride passivation
    • DOI 10.1063/1.115936, PII S0003695196025090
    • T. Lauinger, J. Schmidt, A. G. Aberle, and R. Hezel, Appl. Phys. Lett. APPLAB 0003-6951 68, 1232 (1996). 10.1063/1.115936 (Pubitemid 126684140)
    • (1996) Applied Physics Letters , vol.68 , Issue.9 , pp. 1232-1234
    • Lauinger, T.1    Schmidt, J.2    Aberle, A.G.3    Hezel, R.4
  • 11
    • 77954198226 scopus 로고    scopus 로고
    • Ph.D. thesis, University of Hanover
    • B. Lenkeit, Ph.D. thesis, University of Hanover, 2002.
    • (2002)
    • Lenkeit, B.1
  • 12
    • 77954192324 scopus 로고    scopus 로고
    • Ph.D. thesis, University of Hanover
    • T. Lauinger, Ph.D. thesis, University of Hanover, 2001.
    • (2001)
    • Lauinger, T.1
  • 16
    • 0000513411 scopus 로고    scopus 로고
    • APPLAB 0003-6951. 10.1063/1.117723
    • R. Sinton and A. Cuevas, Appl. Phys. Lett. APPLAB 0003-6951 69, 2510 (1996). 10.1063/1.117723
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 2510
    • Sinton, R.1    Cuevas, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.