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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 595-599

Growth, electrical, and optical properties of nanocrystalline VO 2 (011) thin films prepared by thermal oxidation of magnetron sputtered vanadium films

(5) Luo, Zhenfei a Wu, Zhiming a Xu, Xiangdong a Wang, Tao a Jiang, Yadong a

a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; DEPOSITION TEMPERATURES; ELECTRICAL PROPERTY; GLASS SUBSTRATES; LOW DEPOSITION TEMPERATURE; NANOCRYSTALLINES; NANOGRAIN GROWTH; NEAR INFRARED REGION; OPTICAL INVESTIGATION; OXYGEN ATOM; SEMICONDUCTOR-METAL TRANSITION; THERMAL OXIDATION; THERMAL OXIDATION PROCESS; TRANSITION TEMPERATURE; VANADIUM DIOXIDE;

CARRIER CONCENTRATION; DEPOSITION; DIFFUSION IN SOLIDS; ELECTRIC PROPERTIES; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNETRONS; NANOCRYSTALLINE POWDERS; OPTICAL PROPERTIES; OXIDATION; OXYGEN; SEMICONDUCTOR GROWTH; SUBSTRATES; THIN FILMS; VANADIUM; VANADIUM ALLOYS; X RAY DIFFRACTION; X RAY MICROSCOPES;

FILM PREPARATION;

EID: 77954190554 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3443562 Document Type: Conference Paper

Times cited : (9)

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