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Volumn 137, Issue 1-3, 2007, Pages 289-294

Chalcogen doping of silicon via intense femtosecond-laser irradiation

Author keywords

Doping and impurity implantation; Femtosecond pulsed laser ablation; Infrared absorption; Silicon

Indexed keywords

ABSORPTION; DOPING (ADDITIVES); INFRARED SPECTROSCOPY; LASER ABLATION; LASER BEAM EFFECTS; LASER PULSES;

EID: 33846849157     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2006.10.002     Document Type: Article
Times cited : (144)

References (38)
  • 3
    • 77957575713 scopus 로고    scopus 로고
    • Astrov Y.A., Portsel L.M., Lodygin A.N., Shuman V.B., and Beregulin E.V. (Eds)
    • In: Astrov Y.A., Portsel L.M., Lodygin A.N., Shuman V.B., and Beregulin E.V. (Eds). Gettering and Defect Engineering in Semiconductor Technology Xi (2005) 401-406
    • (2005) Gettering and Defect Engineering in Semiconductor Technology Xi , pp. 401-406
  • 28
    • 85165431579 scopus 로고    scopus 로고
    • J.E. Carey, Harvard University, 2004.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.