Direct probing of trapped charge dynamics in SiN by Kelvin force microscopy

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2010, Pages 94-97

  Vianello, E ^a   Nowak, E ^b   Mariolle, D ^b   Chevalier, N ^b   Perniola, L ^b   Molas, G ^b   Colonna, J P ^b   Driussi, F ^a   Selmi, L ^a  

^a UNIVERSITY OF UDINE   (Italy)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRANSPORT; KELVIN FORCE MICROSCOPY; LATERAL SPREAD; NUMERICAL DEVICE SIMULATION; SILICON RICH; TRAPPED CHARGE;

SILICON NITRIDE;

MICROELECTRONICS;

EID: 77953901594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2010.5466851     Document Type: Conference Paper

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