Microstructural characterizations and hardness evaluation of d.c. reactive magnetron sputtered CrN thin films on stainless steel substrate

Bulletin of Materials Science

Volumn 33, Issue 2, 2010, Pages 103-110

  Shah, Hetal N ^a   Chawla, Vipin ^a   Jayaganthan, R ^a   Kaur, Davinder ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

CrN thin films; Magnetron sputtering; Microhardness; Microstructural characterization

Indexed keywords

CHROMIUM NITRIDE; COMBINED EFFECT; CRN THIN FILMS; FILM DENSITY; GRAIN SIZE; MICRO-STRUCTURAL CHARACTERIZATION; MICROSTRUCTURAL CHARACTERISTICS; PREFERRED ORIENTATIONS; PROCESS PARAMETERS; REACTIVE MAGNETRON SPUTTERING; SEM; SPUTTERING CONDITIONS; SPUTTERING PROCESS; STAINLESS STEEL SUBSTRATES; SUBSTRATE TEMPERATURE; WORKING PRESSURES;

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; CHROMIUM; MAGNETRON SPUTTERING; MICROHARDNESS; NITRIDES; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SURFACE TOPOGRAPHY; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY POWDER DIFFRACTION;

TOPOGRAPHY;

EID: 77953813347     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-010-0014-z     Document Type: Article

References (23)

1. Barshilia H C and Rajam K S 2006 Surf. Coat. Technol. 201, 1827
2. Barshilia H C, Selvakumar N, Deepthi B and Rajam K S 2006 Surf. Coat. Technol. 201, 2193
3. Chandra R, Chawla A and Ayyub P 2006 J. Nanosci. Nanotech. 6, 1119
4. Chawla V, Jayaganthan R and Chandra R 2008 Mater. Charact. 59, 1015
5. Cullity B D 1977 Elements of X-ray diffraction 2/e (ed.) M Cohen (California: Addison Wesley Publishing Co. Inc.) p. 284
6. Cunha L, Andritschky M, Pischow K and Wang Z 1999 Thin Solid Films 355, 465
7. Essen P V, Hoy H, Kamminga J D, Ehiasarian A P and Janssen G C A M 2006 Surf. Coat. Technol. 200, 3496
8. Fabis P M, Cooke R A and McDonough S 1990 J. Vac. Sci. Technol. A 8, 3809
9. Fornies E, Escobr G R, Sanchez O and Albella J M 2006 Surf. Coat. Technol. 200, 6047
10. Gautier C, Moussaoui H, Elstner F and Machet J 1996 Surf. Coat. Technol. 86-87 254
11. Geun Bae Sang, Ki Cho Yong, Moon Kyoung I, Gweon Kim Sang and Wan Kim Sung 2006 Mater. Res. Soc. Symp. Proc. 890, 171.
12. Hones P, Sanjines R and Levy F 1997 Surf. Coat. Technol. 94, 398
13. Kelly A and MacMillan N H 1986 Strong solids (Oxford, London: Clarendon Press)
14. Lamastra F R, Leonardi F, Montanari R, Casadei F, Valente T and Gusmano G 2006 Surf. Coat. Technol. 200, 6172
15. Mariusz Bielawski and Dongyi Seo 2005 Surf. Coat. Technol. 200, 1476
16. Marsh D M 1964 Proc. R. Soc. London A 279, 420
17. Mayrhofer P H, Tischler G and Mitterer C 2001 Surf. Coat. Technol. 142-144 78
18. Mayrhofer P H, Mitterer C, Hultman L and Clemens H 2006 Prog. Mater. Sci. 51, 1032
19. Meunier C, Vives S and Bertrand G 1998 Surf. Coat. Technol. 107, 149
20. Nam Kyung H, Jung Min J and Ham Jeon G 2000 Surf. Coat. Technol. 131, 222
21. Ohring Milton 2006 Material science of thin films: Deposition and structure 2/e (California, USA: Academic Press)
22. Paternoster C, Alberto Fabrizi, Raimondo Cecchini, Mohamad El Mehtedi and Patrick Choquet 2008 J. Mater. Sci. 43, 3377
23. Safi I 2000 Surf. Coat. Technol. 127, 203