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Volumn 6, Issue , 2010, Pages 539-544

Sensitivity analysis of atomic force microscope cantilever made of functionally graded materials

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM TIP; ATOMIC FORCE MICROSCOPE CANTILEVERS; BEAM MATERIAL; CERAMIC VOLUME FRACTION; CONTACT STIFFNESS; EULER BERNOULLI BEAM THEORY; HIGH QUALITY; HIGH-CONTRAST IMAGES; LINEAR SPRING; MICRO-CANTILEVERS; MICROCANTILEVER BEAMS; POWER LAW; RESONANT FREQUENCIES; SURFACE CONTACT;

EID: 77953774376     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2009-86254     Document Type: Conference Paper
Times cited : (56)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.