Study of the sensitivity of the first four flexural modes of an AFM cantilever with a sidewall probe

Ultramicroscopy

Volumn 108, Issue 7, 2008, Pages 619-624

  Chang, Win Jin ^a   Lee, Haw Long ^a   Chen, Terry Yuan Fang ^b  

^a KUN SHAN UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Atomic force microscope; Sidewall scanning; Vibration sensitivity

Indexed keywords

ATOMIC FORCE MICROSCOPY; NATURAL FREQUENCIES; SENSITIVITY ANALYSIS; STIFFNESS; VIBRATIONS (MECHANICAL);

CONTACT STIFFNESS; SIDEWALL SCANNING; VIBRATION SENSITIVITY;

CANTILEVER BEAMS;

ARTICLE; ATOMIC FORCE MICROSCOPE; ATOMIC FORCE MICROSCOPY; MATHEMATICAL ANALYSIS; MICROSCOPE; SENSITIVITY ANALYSIS; VIBRATION SENSE;

EID: 44149086145     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2007.10.003     Document Type: Article

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