Effect of tip length and normal and lateral contact stiffness on the flexural vibration responses of atomic force microscope cantilevers

Microelectronic Engineering

Volumn 71, Issue 1, 2004, Pages 15-20

  Wu, Tser Son ^a   Chang, Win Jin ^a   Hsu, Jung Chang ^a  

^a KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

Atomic force microscope; Sensitivity; Surface properties

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; BOUNDARY CONDITIONS; ELECTRIC CONDUCTORS; ELECTRIC INSULATORS; EQUATIONS OF MOTION; MATHEMATICAL MODELS; SENSITIVITY ANALYSIS; STIFFNESS; SURFACE TOPOGRAPHY; VIBRATIONS (MECHANICAL);

FLEXURAL VIBRATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0345171020     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2003.08.009     Document Type: Article

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