A porous SiC ammonia sensor

Sensors and Actuators, B: Chemical

Volumn 109, Issue 1, 2005, Pages 44-46

  Connolly, E J ^a   Timmer, B ^b   Pham, H T M ^a   Groeneweg, J ^a   Sarro, P M ^a   Olthuis, W ^b   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Capacitive NH3 sensor; Porous SiC

Indexed keywords

AMMONIA; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTRODES; ETCHING; FIELD EFFECT TRANSISTORS; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THIN FILMS;

ANODIZATION; CAPACITIVE NH3 SENSORS; GAS CONCENTRATION; POROUS SIC;

CHEMICAL SENSORS;

EID: 23044471923     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.03.067     Document Type: Article

References (5)

1. The International Institute of Ammonia refrigeration, http://www.iiar.org.
2. T.T. Groot, Sense of Contact 6, keynote: Sensor Research at Energy research Center Netherlands (ECN), March 2004.
3. B.H. Timmer, Amina-chip, Ph.D. Thesis, U. Twente, The Netherlands, 2004.
4. A. Lloyd Spetz Si and SiC based field effect devices Proceedings of the TAFT'2000 Nancy, France 27-30 March 2000
5. E.J. Connolly Comparison of porous Si, porous polySi and porous SiC as materials for humidity sensing applications Sens. Actuators A99 2002 25 30