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Volumn 13, Issue 8, 2010, Pages

High quality single-crystal laterally graded SiGe on insulator by rapid melt growth

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAPS; HIGH QUALITY; LATERAL VARIATIONS; MELT GROWTH; MICRO-CRUCIBLES; MISCIBILITY GAP; RAPID MELT GROWTH; SELF-ALIGNED; SIGE ON INSULATOR; SILICON DIOXIDE;

EID: 77953591216     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3436665     Document Type: Article
Times cited : (10)

References (15)
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  • 3
    • 0000360476 scopus 로고    scopus 로고
    • SiGe-based semiconductor-on-insulator substrate created by low-energy separation-by-implanted-oxygen
    • DOI 10.1063/1.121674, PII S0003695198024267
    • S. Fukatsu, Y. Ishikawa, T. Saito, and N. Shibata, Appl. Phys. Lett. APPLAB 0003-6951, 72, 3485 (1998). 10.1063/1.121674 (Pubitemid 128673692)
    • (1998) Applied Physics Letters , vol.72 , Issue.26 , pp. 3485-3487
    • Fukatsu, S.1    Ishikawa, Y.2    Saito, T.3    Shibata, N.4
  • 7
    • 34247203773 scopus 로고    scopus 로고
    • Thermoelectric power generation using large-area Si/SiGe pn-junctions with varying Ge content
    • DOI 10.1088/0268-1242/22/1/S41, PII S0268124207299043, S41
    • M. Wagner, G. Span, S. Holzer, and T. Grasser, Semicond. Sci. Technol. SSTEET 0268-1242, 22, S173 (2007). 10.1088/0268-1242/22/1/S41 (Pubitemid 46620727)
    • (2007) Semiconductor Science and Technology , vol.22 , Issue.1
    • Wagner, M.1    Span, G.2    Holzer, S.3    Grasser, T.4
  • 11
    • 15944366852 scopus 로고    scopus 로고
    • Growth and fundamental properties of SiGe bulk crystals
    • DOI 10.1016/j.jcrysgro.2004.10.071, PII S0022024804013867, Proceeedings of the 14th International Conference on Crystal Growth and the 12th International Conference on Vapor Growth and Epitaxy
    • I. Yonenaga, J. Cryst. Growth JCRGAE 0022-0248, 275, 91 (2005). 10.1016/j.jcrysgro.2004.10.071 (Pubitemid 40429020)
    • (2005) Journal of Crystal Growth , vol.275 , Issue.1-2 , pp. 91-98
    • Yonenaga, I.1
  • 12
    • 25644439121 scopus 로고    scopus 로고
    • Rapid melt growth of germanium crystals with self-aligned microcrucibles on Si substrates
    • DOI 10.1149/1.1946368
    • Y. Liu, M. D. Deal, and J. D. Plummer, J. Electrochem. Soc. JESOAN 0013-4651, 152, G688 (2005). 10.1149/1.1946368 (Pubitemid 41381163)
    • (2005) Journal of the Electrochemical Society , vol.152 , Issue.8
    • Liu, Y.1    Deal, M.D.2    Plummer, J.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.