Practical flare compensation strategy for DRAM device

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7636, Issue , 2010, Pages

  Lim, Chang Moon ^a   Park, Jun Taek ^a   Moon, James ^a   Koo, Sunyoung ^a   Hyun, Yoonsuk ^a   Kim, Hyeong Soo ^a   Yim, Donggyu ^a   Park, Sung Ki ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

ADT; critical radius; DRAM; extreme UV; Flare; pattern density; PSF

Indexed keywords

COMPENSATION STRATEGY; COMPUTATIONAL TIME; CONVOLUTION INTEGRALS; CRITICAL RADIUS; DEVICE LAYOUT; DRAM DEVICES; EUV LITHOGRAPHY; EXTREME UV; LONG TAIL; MICRON RANGE; PATTERN DENSITY; POINT-SPREAD FUNCTION; PROJECTION OPTICS;

CONVOLUTION; LITHOGRAPHY; SURFACE ROUGHNESS;

OPTICAL TRANSFER FUNCTION;

EID: 77953414507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.846509     Document Type: Conference Paper

References (6)

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