Diffraction gratings fabricated in DLC thin films

Surface and Coatings Technology

Volumn 204, Issue 18-19, 2010, Pages 2966-2970

  Cirino, G A ^a   Mansano, R D ^a   Verdonck, P ^b   Jasinevicius, R G ^a   Neto, L G ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b IMEC   (Belgium)

Author keywords

Amorphous hydrogenated carbon; Computer generated hologram; Diffraction gratings; Digital holography; DLC thin film; Fourier optics

Indexed keywords

AFM; AMORPHOUS HYDROGENATED CARBON; ANISOTROPIC REACTIVE ION ETCHING; COMPUTER GENERATED HOLOGRAMS; DIAMOND-LIKE CARBON; DIGITAL HOLOGRAPHY; DLC FILM; DLC THIN FILMS; HE-NE LASERS; MANUFACTURING PROCESS; MICRORELIEF; MONOCHROMATIC LASERS; OPERATION WAVELENGTH; OPTICAL CHARACTERIZATION; OPTICAL PATH DIFFERENCE; PLASMA CHEMISTRIES; REACTIVE MAGNETRON SPUTTERING; TWO-DIMENSIONAL DIFFRACTION GRATINGS;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DIAMOND LIKE CARBON FILMS; DIFFRACTION GRATINGS; ELECTRON HOLOGRAPHY; HOLOGRAMS; HOLOGRAPHIC INTERFEROMETRY; HYDROGENATION; METHANE; OXYGEN; PLASMA DIAGNOSTICS; REACTIVE ION ETCHING; SURFACE ROUGHNESS; THIN FILMS; TWO DIMENSIONAL; VAPOR DEPOSITION;

COMPUTER GENERATED HOLOGRAPHY;

EID: 77953363310     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.02.037     Document Type: Article

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