Measurement of optical constants of thin a-C:H films

Microelectronics Journal

Volumn 31, Issue 4, 2000, Pages 251-254

  De Souza, D R ^a   Soares, L L ^a   Cescato, L ^a   Alves, M A R ^a   Braga, E S ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; HYDROGENATION; INFRARED RADIATION; LIGHT ABSORPTION; LIGHT TRANSMISSION; OPTICAL VARIABLES MEASUREMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; THIN FILMS;

OPTICAL CONSTANTS;

OPTICAL FILMS;

EID: 0033903523     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00111-1     Document Type: Article

References (9)

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