A kernel-based DFM model for process from layout to wafer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7641, Issue , 2010, Pages

  Yang, Yiwei ^a   Shi, Zheng ^a   Sun, Litian ^a   Chen, Ye ^b   Hu, Zhijuan ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b Anchor Semiconductor Inc   (United States)

Author keywords

Design for manufacturability (DfM); DfM model; Free element model (FEM); Manufacturability verification; Optimization

Indexed keywords

DESIGN-FOR-MANUFACTURABILITY; DFM MODEL; MANUFACTURABILITY; MANUFACTURABILITY VERIFICATION; MODEL FREE;

CONVOLUTION; CUTOFF FREQUENCY; MACHINE DESIGN; OPTIMIZATION;

COMPUTER SIMULATION;

EID: 77953252787     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.844671     Document Type: Conference Paper

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