Quantification of two-dimensional structures generalized for OPC model verification

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 1, 2007, Pages

  Shi, Xuelong ^a   Chen, J Fung ^a   Van Den Broeke, Doug ^a   Hsu, Stephen ^a   Hsu, Michael ^a  

^a ASML US Inc   (United States)

Author keywords

DFM verification; Generalized two dimensional structures; OPC model; Quantification

Indexed keywords

CALIBRATION; MICROPROCESSOR CHIPS; SEMICONDUCTOR MATERIALS; SIGNAL ANALYSIS;

IMAGING SIGNAL SPACES; MODEL CALIBRATION; OPTICAL PROXIMITY CORRECTION (OPC);

LITHOGRAPHY;

EID: 35148869574     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.713867     Document Type: Conference Paper

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