Large-area high-density helicon plasma sources

Plasma Sources Science and Technology

Volumn 19, Issue 3, 2010, Pages

  Shinohara, S ^a   Motomura, T ^a   Tanaka, K ^a   Tanikawa, T ^b   Shamrai, K P ^c  

^a KYUSHU UNIVERSITY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

^c INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL LENGTH; ELECTRON DENSITIES; HELICON PLASMA; HELICON PLASMA SOURCE; HIGH-BETA PLASMAS; HIGH-DENSITY; LOW ASPECT RATIO; LOW MAGNETIC FIELDS; MAGNETIC FIELD CONFIGURATIONS; MAGNETIC PRESSURE; PARTICLE PRODUCTION; PLASMA PRESSURES; RADIO FREQUENCY FIELDS; RF WAVES; SPATIAL PROFILES; STANDING WAVE;

HELICONS; MAGNETIC FIELDS; PLASMA SOURCES;

ASPECT RATIO;

EID: 77952992378     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/3/034018     Document Type: Article

References (27)

1. Boswell R W 1970 Phys. Lett. A 33 457
2. Shinohara S 1997 Japan. J. Appl. Phys. 36 4695 and references therein (review paper)
3. Boswell R W and Chen F F 1997 IEEE Trans. Plasma Sci. 25 1229 and references therein
4. Chen F F and Boswell R W 1997 IEEE Trans. Plasma Sci. 25 1245 and references therein
5. Shinohara S 2002 J. Plasma Fusion Res. 78 5 and references therein (in Japanese)
6. Stevens J E, Sowa M J and Cecchi J L 1995 J. Vac. Sci. Technol. A 13 2476
7. Shinohara S, Takechi S and Kawai Y 1996 Japan. J. Appl. Phys. 35 4503
8. Shinohara S, Takechi S, Kaneda N and Kawai Y 1997 Plasma Phys. Control. Fusion 39 1479
9. Shinohara S and Tanikawa T 2004 Rev. Sci. Instrum. 75 1941
10. Tanikawa T and Shinohara S 2004 Proc. Int. Congress on Plasma Physics (Nice, France) ccsd-00002013
11. Shinohara S and Tanikawa T 2005 Phys. Plasmas 12 044502
12. Tanikawa T and Shinohara S 2006 Thin Solid Films 506-507 559
13. Shinohara S, Hada T, Motomura T, Tanaka K, Tanikawa T, Toki K, Tanaka Y and Shamrai K P 2009 Phys. Plasmas 16 057104
14. Motomura T, Tanaka K, Shinohara S, Tanikawa T and Shamrai K P 2009 J. Plasma Fusion Res. Ser. 8 7
15. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
16. Jahn R G 1968 Physics of Electric Propulsion (New York: McGraw-Hill)
17. Charles C 2009 J. Phys D: Appl. Phys. 42 163001
18. Scime E E, Keiter P A, Balkey M M, Boivin R F, Kline J L and Blackburn M 2005 Phys. Plasmas 7 2157
19. Corr C S and Boswell R W 2007 Phys. Plasmas 14 122503
20. Kivelson M G and Russel C T 1995 Introduction to Space Physics (Cambridge: Cambridge University Press)
21. Stenzel R L and Urrutia J M 2000 Phys. Plasmas 7 4450
22. Sykes A 1997 Phys. Plasmas 4 1665
23. Tanaka K, Motomura T, Murakami K and Shinohara S 2008 Proc. Int. Congress on Plasma Physics (Fukuoka, Japan) FA.P2-004
24. Shamrai K P, Shinohara S, Virko V F, Kirichenko G S, Slobodyan V M and Virko Yu V 2005 Plasma Phys. Control. Fusion 47 A307
25. Chen F F 1991 Plasma Phys. Control. Fusion 33 339
26. Chen F F 1984 Introduction to Plasma Physics and Controlled Fusion 2nd edn (New York: Plenum)
27. Miyamoto K 1989 Plasma Physics for Nuclear Fusion (Cambridge, MA: MIT Press)