Plasma performance in very large helicon device

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 559-563

  Tanikawa, T ^a   Shinohara, S ^b  

^a TOKAI UNIVERSITY   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Helicon plasma source; Large volume high density plasma; Profile control; Spiral antenna

Indexed keywords

ARGON; GLASS; HELIUM; MAGNETIC FIELDS; PLASMA DENSITY; PLASMAS; QUARTZ;

HELICON PLASMA SOURCE; LARGE-VOLUME HIGH-DENSITY PLASMA; PLASMA CHARACTERISTICS; PROFILE CONTROL; SPIRAL ANTENNA;

HELICONS;

EID: 33645234734     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.053     Document Type: Article

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