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Volumn 107, Issue 10, 2010, Pages

Surface loss probabilities of H and N radicals on different materials in afterglow plasmas employing H2 and N2 mixture gases

Author keywords

[No Author keywords available]

Indexed keywords

AFTERGLOW PLASMAS; DECAY CURVES; HIGH PRESSURE; HOLLOW CATHODE LAMP; MICRODISCHARGES; PLASMA-SURFACE INTERACTIONS; QUANTITATIVE MEASUREMENT; RADICAL DENSITIES; SURFACE LOSS PROBABILITIES; VACUUM ULTRAVIOLET ABSORPTION SPECTROSCOPIES; VUV PHOTON; WALL MATERIALS;

EID: 77952977187     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3372750     Document Type: Article
Times cited : (17)

References (24)
  • 9
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    • VACUAV 0042-207X, () (in Japanese)
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    • (1992) Vacuum , vol.35 , pp. 894
    • Hatanaka, Y.1    Mickramanayaka, S.2
  • 10
    • 36449009705 scopus 로고
    • JAPIAU 0021-8979. 10.1063/1.349662
    • J. P. Booth and N. Sadegi, J. Appl. Phys. JAPIAU 0021-8979 70, 611 (1991). 10.1063/1.349662
    • (1991) J. Appl. Phys. , vol.70 , pp. 611
    • Booth, J.P.1    Sadegi, N.2
  • 13
    • 36549093216 scopus 로고
    • JAPIAU 0021-8979. 10.1063/1.339662
    • P. J. Chantry, J. Appl. Phys. JAPIAU 0021-8979 62, 1141 (1987). 10.1063/1.339662
    • (1987) J. Appl. Phys. , vol.62 , pp. 1141
    • Chantry, P.J.1
  • 14
    • 36849117750 scopus 로고
    • JCPSA6 0021-9606. 10.1063/1.1732363
    • E. A. Mason and L. Monchick, J. Chem. Phys. JCPSA6 0021-9606 36, 2746 (1962). 10.1063/1.1732363
    • (1962) J. Chem. Phys. , vol.36 , pp. 2746
    • Mason, E.A.1    Monchick, L.2
  • 17
    • 0018469799 scopus 로고
    • ION- AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - AN IMPORTANT EFFECT IN PLASMA ETCHING.
    • DOI 10.1063/1.326355
    • J. W. Coburn and H. F. Winters, J. Appl. Phys. JAPIAU 0021-8979 50, 3189 (1979). 10.1063/1.326355 (Pubitemid 10469931)
    • (1979) Journal of Applied Physics , vol.50 , Issue.5 , pp. 3189-3196
    • Coburn, J.W.1    Winters Harold, F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.