Optical ridge waveguides preserving the thermooptic features in LiNbO 3 crystals fabricated by combination of proton implantation and selective wet etching

Optics Express

Volumn 18, Issue 11, 2010, Pages 11444-11449

  Tan, Yang ^a   Chen, Feng ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; PROTONS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; WET ETCHING;

INTEGRATED PHOTONICS; MODAL FIELD; NUMERICAL SIMULATION; POTENTIAL APPLICATIONS; PROPAGATION LOSS; PROTON IMPLANTATION; RIDGE WAVEGUIDES; SELECTIVE WET ETCHING; SIMPLE METHOD; THERMAL ANNEALING TREATMENT; THERMO-OPTIC COEFFICIENTS; THERMOOPTICS;

WAVEGUIDES;

LITHIUM NIOBATE; NIOBIUM; OXIDE; PROTON;

ARTICLE; CRYSTALLIZATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; REFRACTOMETRY; SURFACE PROPERTY; SYNTHESIS; TEMPERATURE; WETTABILITY;

CRYSTALLIZATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; NIOBIUM; OXIDES; PROTONS; REFRACTOMETRY; SURFACE PROPERTIES; TEMPERATURE; WETTABILITY;

EID: 77952852434     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.011444     Document Type: Article

References (33)

1. L. Arizmendi, "Photonic applications of lithium niobate crystals," Phys. Status Solidi, A Appl. Res. 201 (2), 253-283 (2004).
2. M. Kösters, B. Sturman, P. Werheit, D. Haertle, and K. Buse, "Optical cleaning of congruent lithium, niobate crystals," Nat. Photonics 3 (9), 510-513 (2009).
3. W. Sohler, H. Hu, R. Ricken, V. Quiring, Ch. Vannahme, H. Herrmann, D. Büchter, S. Reza, W. Grundkötter, S. Orlov, H. Suche, R. Nouroozi, and Y. Min, "Integrated Optical Devices in Lithium Niobate," Opt. Photon. News 19 (1), 24-31 (2008).
4. G. Lifante, Integrated Photonics: Fundamentals Wiley, Atrium, 2008.
5. 3+ channel waveguides," J. Lumin. 129 (12), 1698-1701 (2009).
6. 3) channel waveguides," Opt. Express 15 (14), 8805-8811 (2007).
7. F. Chen, "Photonic guiding structures in lithium niobate crystals produced by energetic ion beams," J. Appl. Phys. 106 (8), 081101 (2009).
8. 3: Planar optical waveguide formation and characterization," J. Appl. Phys. 92 (11), 6477-6483 (2002).
9. 3," Phys. Stat. Solidi A 206 (6), 1109-1116 (2009).
10. 3) using femtosecond pulses in the low repetition rate regime," Appl. Phys. Lett. 88 (11), 111109 (2006).
11. P. Zhang, Y. Ma, J. Zhao, D. Yang, and H. Xu, "One-dimensional spatial dark soliton-induced channel waveguides in lithium niobate crystal," Appl. Opt. 45 (10), 2273-2278 (2006).
12. P. D. Townsend, P. J. Chandler, and L. Zhang, "Optical Effects of ion implantation" (Cambridge Univ. Press, Cambridge, 1994).
13. F. Chen, X. L. Wang, and K. M. Wang, "Development of ion implanted optical waveguides in optical materials: a review," Opt. Mater. 29 (11), 1523-1542 (2007).
14. F. Schrempel, Th. Gischkat, H. Hartung, Th. Höche, E.-B. Kley, A. Tünnermann, and W. Wesch, "Ultrathin membranes in x-cut lithium niobate," Opt. Lett. 34 (9), 1426-1428 (2009).
15. M. Levy, R. M. Osgood, Jr., R. Liu, L. E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, "Fabrication of single-crystal lithium niobate thin films by crystal ion slicing," Appl. Phys. Lett. 73 (16), 2293 (1998).
16. G. Poberaj, M. Koechlin, F. Sulser, A. Guarino, J. Hajfler, and P. Günter, "Ion-sliced Lithium Niobate Thin Films for Active Photonic Devices," Opt. Mater. 31 (7), 1054-1058 (2009).
17. A. Majkic, M. Koechlin, G. Poberaj, and P. Günter, "Optical microring resonators in fluorineimplanted lithium niobate," Opt. Express 16 (12), 8769-8779 (2008).
18. M. Bianconi, F. Bergamini, G. G. Bentini, A. Cerutti, M. Chiarini, P. De Nicola, and G. Pennestrì, "Modification of the etching properties of x-cut Lithium Niobate by ion implantation," Nucl. Instrum. Methods Phys. Res. B 266 (8), 1238-1241 (2008).
19. H. Hartung, E.-B. Kley, A. Tünnermann, Th. Gischkat, F. Schrempel, and W. Wesch, "Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching," Opt. Lett. 33 (20), 2320-2322 (2008).
20. P. Rabiei, and W. H. Steier, "Lithium, niobate ridge waveguides and modulators fabricated using smart guide," Appl. Phys. Lett. 86 (16), 161115 (2005).
21. I. E. Barry, G. W. Ross, P. G. R. Smith, and R. W. Eason, "Ridge waveguides in lithium niobate fabricated by differential etching following spatially selective domain inversion," Appl. Phys. Lett. 74 (10), 1487-1488 (1999).
22. 3 waveguides," J. Appl. Phys. 101 (9), 094109 (2007).
23. J. Olivares, G. García, A. García-Navarro, F. Agulló-López, O. Caballero, and A. García-Cabañes, "Generation of high-confinement step-like waveguides in LiNbO3 by swift heavy ion-beam irradiation," Appl. Phys. Lett. 86 (18), 183501 (2005).
24. 3 channel waveguides," Appl. Phys. Lett. 94 (1), 011109 (2009).
25. 3+ ion implantation," Appl. Phys. B 94 (3), 467-471 (2009).
26. P. J. Chandler, and F. L. Laina, "A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation," Opt. Acta (Lond.) 33, 127-142 (1986).
27. D. Yevick, and W. Bardyszewski, "Correspondence of variational finite-difference (relaxation) and imaginarydistance propagation methods for modal analysis," Opt. Lett. 17 (5), 329-330 (1992).
28. 3 Optical Waveguide Resonators," Appl. Phys. B 36 (3), 143-147 (1985).
29. 6 waveguides and their application as optical modulator," Opt. Express 17 (16), 13677-13684 (2009).
30. M. Bianconi, G. G. Bentini, M. Chiarini, P. De Nicola, G. B. Montanari, A. Nubile, and S. Sugliani, "Defect engineering and micromachining of lithium, niobate by ion implantation," Nucl. Instrum. Methods Phys. Res. B 267 (17), 2839-2845 (2009).
31. J. F. Ziegler, computer code, SRIM http://www.srim.org.
32. 3," Nucl. Instrum. Methods Phys. Res. B 250 (1-2), 164-168 (2006).
33. 3," J. Appl. Phys. 65 (6), 2406-2408 (1989).