Ultrathin membranes in x-cut lithium niobate

Optics Letters

Volumn 34, Issue 9, 2009, Pages 1426-1428

  Schrempel, Frank ^a   Gischkat, Thomas ^a   Hartung, Holger ^a   Höche, Thomas ^b   Kley, Ernst Bernhard ^a   Tünnermann, Andreas ^a   Wesch, Werner ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROFLUORIC ACID; ION BEAMS; IONS; NIOBIUM COMPOUNDS; WET ETCHING;

AMORPHOUS LAYER; AS ANNEALING; FLUENCES; HIGH INDEX CONTRAST; ION ENERGIES; LITHIUM NIOBATE; LITHIUM NIOBATE CRYSTAL; ULTRA-THIN MEMBRANES;

MEMBRANES;

EID: 66349110517     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.34.001426     Document Type: Article

References (21)

1. R. M. Roth, D. Djukic, Y. S. Lee, R. M. Osgood, S. Bakhru, B. Laulicht, K. Dunn, H. Bakhru, L. Q. Wu, and M. B. Huang, Appl. Phys. Lett. 89, 112906 (2006).
2. A. M. Radojevic, M. Levy, R. M. Osgood, Jr., A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
3. M. Levy, R. M. Osgood, Jr., R. Liu, L. E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 73, 2293 (1998).
4. T. A. Ramadan, M. Levy, and R. M. Osgood, Jr., Appl. Phys. Lett. 76, 1407 (2000).
5. A. M. Radojevic, M. Levy, H. Kwak, and R. M. Osgood, Jr., Appl. Phys. Lett. 75, 2888 (1999).
6. A. Guarino, G. Poberaj, D. Rezzonico, R. Degl'Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
7. Y. B. Park, B. Min, K. J. Vahala, and H. A. Atwater, Adv. Mater. (Weinheim, Ger.) 18, 1533 (2006).
8. D. Djukic, R. M. Roth, J. T. Yardley, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, Opt. Express 12, 6159 (2004).
9. T. Izuhara, R. M. Roth, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
10. P. Rabiei and W. H. Steier, Appl. Phys. Lett. 86, 161115 (2005).
11. P. Rabiei and P. Gunter, Appl. Phys. Lett. 85, 4603 (2004).
12. I. Szafraniak, I. Radu, R. Scholz, M. Alexe, and U. Gösele, Integr. Ferroelectr. 55, 983 (2003).
13. D. Djukic, T. Izuhara, R. M. Roth, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, in Proceedings on Conference on Lasers and Electro-Optics (CLEO) (IEEE, 2005), Vol. 1, p. 229.
14. H. Hartung, R. Geiss, Th. Gischkat, F. Schrempel, R. Iliew, Th. Pertsch, F. Lederer, W. Wesch, E.-B. Kley, and A. Tünnermann, in Proceedings of IEEE/LEOS Winter Topicals Meeting Series (IEEE, 2009), p. 64.
15. J. F. Ziegler, http://www.srim.org/.
16. K. Gärtner, Nucl. Instrum. Methods Phys. Res. B 227, 522 (2005).
17. F. Schrempel, Th. Gischkat, H. Hartung, E.-B. Kley, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 250, 164 (2006).
18. J. Reinisch, F. Schrempel, Th. Gischkat, and W. Wesch, J. Electrochem. Soc. 155, D298 (2008).
19. F. Schrempel, Th. Gischkat, H. Hartung, E.-B. Kley, W. Wesch, and A. Tünnermann, in Growth, Modification, and Analysis by Ion Beams at the Nanoscale,J.K.N. Lindner, M. Toulemonde, W. J. Weber, and B. L. Doyle, eds. (Materials Research Society, 2005), paper 0908- OO16-01.1.
20. A. Meldrum, L. A. Boatner, W. J. Weber, and R. C. Ewing, J. Nucl. Mater. 300, 242 (2002).
21. Th. Gischkat, F. Schrempel, Th. Höche, and W. Wesch, "Annealing behavior of lithium niobate irradiated with He ions at 100 K," Nucl. Instrum. Methods Phys. Res. B (to be published).