Active CMOS-MEMS AFM-like conductive probes for field-emission assisted nano-scale fabrication

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 336-339

  Zhang, Y ^a   Santhanam, S ^a   Liu, J ^a   Fedder, G K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; ACTIVE PROBE; AFM; CAPACITIVE SENSOR; CMOS-MEMS; CONDUCTIVE PROBE; EMITTED ELECTRON; FABRICATION PROCESS; GROWTH CONDITIONS; KEY PARTS; NANO-SCALE FABRICATION; NANOFABRICATION; PROBE TIPS; SI NANOWIRE; SINGLE-STEP;

ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; FABRICATION; FIELD EMISSION; MECHANICAL ENGINEERING; MECHANICS; NANOWIRES; PROBES; REACTIVE ION ETCHING;

CHEMICAL VAPOR DEPOSITION;

EID: 77952780837     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442496     Document Type: Conference Paper

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