Direct measurement of emission current distribution of Spindt-type field emitters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 527-532

  Xie, Chenggang ^a   Hayes, Greg ^a   Wei, Yi ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRIC VARIABLES MEASUREMENT; GATES (TRANSISTOR); STATISTICAL METHODS;

EMISSION CURRENT DISTRIBUTION; SPINDT-TYPE FIELD EMITTER;

ELECTRIC CURRENT DISTRIBUTION;

EID: 0035272272     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1358859     Document Type: Article

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