MEMS-based air turbine with radial-inflow type journal bearing

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 3, Issue 3, 2008, Pages 297-304

  Tanaka, Shuji ^a   Miura, Yuichi ^a   Kang, Piljoong ^a   Hikichi, Kousuke ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Air bearing; Deep reactive ion etching (DRIE); Direct bonding; Turbo machinery

Indexed keywords

JOURNAL BEARINGS; MEMS; RADIAL FLOW; REACTIVE ION ETCHING;

AIR BEARING; DIRECT BONDING;

COMPRESSED AIR MOTORS;

EID: 42549118219     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20270     Document Type: Article

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