Formation of Cu or Cu2O nanoparticles embedded in a polyimide film for nanofloating gate memory

INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Volumn , Issue , 2010, Pages 244-245

  Choi, Dong Joo ^a   Kim, Young Ho ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM ELECTRODES; CAPACITANCE VOLTAGE; CU FILMS; MEMORY EFFECTS; NANOFLOATING GATE MEMORY; PI FILM; POLYAMIC ACIDS; POLYIMIDE FILM; ROOM TEMPERATURE; SI(1 0 0);

HYBRID MATERIALS; NANOELECTRONICS; POLYIMIDES; POLYMERIC FILMS; THERMOSETS;

COPPER;

EID: 77951654866     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INEC.2010.5424661     Document Type: Conference Paper

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