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Volumn , Issue , 2008, Pages 2148-2155

An analytical model for conveyor based AMHS in semiconductor wafer fabs

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS APPROACHES; ANALYTICAL MODELS; AUTOMATED MATERIAL HANDLING SYSTEMS; NUMERICAL EXAMPLES; QUEUING MODELS; REASONABLE ACCURACIES; SEMI-CONDUCTOR WAFERS; SEMICONDUCTOR MANUFACTURING; WORK IN PROCESS;

EID: 60749108614     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2008.4736313     Document Type: Conference Paper
Times cited : (17)

References (15)
  • 1
    • 33144464532 scopus 로고    scopus 로고
    • A new low cost approach in 200 mm and 300 mm AMHS
    • Arzt, T., and F. Bulcke. 2000. A new low cost approach in 200 mm and 300 mm AMHS. Semiconductor FABTECH, 19-26.
    • (2000) Semiconductor FABTECH , pp. 19-26
    • Arzt, T.1    Bulcke, F.2
  • 2
    • 0024013966 scopus 로고
    • Analytical solution of closed-loop conveyor systems with discrete and deterministic material flow
    • Bastani, A. S. 1988. Analytical solution of closed-loop conveyor systems with discrete and deterministic material flow. European Journal of Operational Research. 35:187-192.
    • (1988) European Journal of Operational Research , vol.35 , pp. 187-192
    • Bastani, A.S.1
  • 3
    • 0025560011 scopus 로고
    • Closed-loop conveyor systems with breakdown and repair of unloading stations
    • Bastani, A. S. 1990. Closed-loop conveyor systems with breakdown and repair of unloading stations. IIE Transactions 22:351-360.
    • (1990) IIE Transactions , vol.22 , pp. 351-360
    • Bastani, A.S.1
  • 4
    • 11844301290 scopus 로고    scopus 로고
    • Throughput performance analysis and machine layout for discrete-space closed-loop conveyors
    • Bozer, Y. A., and Y-J. Hsieh. 2005. Throughput performance analysis and machine layout for discrete-space closed-loop conveyors. HE Transactions 37:77-89.
    • (2005) HE Transactions , vol.37 , pp. 77-89
    • Bozer, Y.A.1    Hsieh, Y.-J.2
  • 8
    • 11844280603 scopus 로고
    • Introduction to conveyor theory
    • Mayer, H. 1960. Introduction to conveyor theory. Western Electric Enginee. 4(l):43-47.
    • (1960) Western Electric Enginee , vol.4 , Issue.L , pp. 43-47
    • Mayer, H.1
  • 10
    • 49749090780 scopus 로고    scopus 로고
    • Survey of research in modeling conveyor-based automated material handling systems in wafer fabs
    • Nazzal, D., and A. El-Nashar. 2007. Survey of research in modeling conveyor-based automated material handling systems in wafer fabs. In Proceedings of the 2007 Winter Simulation Conference.
    • (2007) Proceedings of the 2007 Winter Simulation Conference
    • Nazzal, D.1    El-Nashar, A.2
  • 13
    • 60749133688 scopus 로고
    • A stochastic recirculation system with random access
    • Pourbabai, B., and D. Sunderman. 1985. A stochastic recirculation system with random access. Mathematical Modeling 7:185-196.
    • (1985) Mathematical Modeling , vol.7 , pp. 185-196
    • Pourbabai, B.1    Sunderman, D.2
  • 15
    • 60749088475 scopus 로고    scopus 로고
    • SEMATECH report. 2001. Q2 2001 productivity analysis factory & cost simulation experiment report. available online at International SEMATECH website . Tausch, F., and L. Hennessey. 2002. Evaluation and comparison of a car-based vs. a CFT material handling system for a 300mm fab. In Proceedings of the Modeling and Analysis of Semiconductor Manufacturing Conference.
    • SEMATECH report. 2001. Q2 2001 productivity analysis factory & cost simulation experiment report. available online at International SEMATECH website . Tausch, F., and L. Hennessey. 2002. Evaluation and comparison of a car-based vs. a CFT material handling system for a 300mm fab. In Proceedings of the Modeling and Analysis of Semiconductor Manufacturing Conference.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.