Two-color photo-initiation/inhibition lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7591, Issue , 2010, Pages

  McLeod, Robert R ^a   Kowalski, Benjamin A ^a   Cole, Michael C ^b  

^a UNIVERSITY OF COLORADO   (United States)

^b InPhase Technologies   (United States)

Author keywords

Diffraction limit; Lithography; Optical data storage; Photolithography; Photopolymer; Super resolution

Indexed keywords

DIFFRACTION LIMIT; DIFFRACTION LIMITS; INHIBITORY PATTERNS; NEAR-FIELD; ONE PHOTON ABSORPTION; PHOTO-INITIATOR; SINGLE-PHOTON ABSORPTIONS; SIZE AND SHAPE; SUPER RESOLUTION; THREE-DIMENSIONAL STRUCTURE; TWO-COLOR;

ABSORPTION; COLOR; ELECTROMAGNETIC WAVE DIFFRACTION; FABRICATION; LIGHT; MULTIPHOTON PROCESSES; OPTICAL DATA PROCESSING; PHOTOLITHOGRAPHY; PHOTONS;

OPTICAL DATA STORAGE;

EID: 77951573997     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.845850     Document Type: Conference Paper

References (17)

1. S. Kawata, H.-B. Sun, T. Tanaka, K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001).
2. W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, J. W. Perry, "65 nm feature sizes using visible wavelength 3-D multiphoton lithography," Opt. Express 15, 3426-3436 (2007)
3. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-1731 (1996).
4. S. Nolte, M. Will, J. Burghoff, A. Tuennermann, "Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics," Appl. Phys. A 77, 109-111 (2003).
5. G. Donnert, et al, "Macromolecular-scale resolution in biological fluorescence microscopy," PNAS 103, 11440-11445 (2006).
6. T. L. Andrew, H.-Y. Tsai, R. Menon, "Confining Light to Deep Subwavelength Dimensions to Enable Optical Nanopatterning," Science 324, 917-921 (2009)
7. L. Li, R. R. Gattass, E. Gershgoren, H. Hwang, J. T. Fourkas, "Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization," Science 324, 910-914 (2009)
8. T. F. Scott, C. N. Bowman, B. A. Kowalski, A. C. Sullivan, C.N. Bowman, R. R. McLeod, "Two-Color Single-Photon Photoinitiation and Photoinhibition for Sub-diffraction Photolithography," Science 324, 913-917, 2009
9. 1/2 - 1.
10. J. H. Strickler and W. W. Webb, "Three-dimensional optical data storage in refractive two-photon point excitation," Opt. Lett. 16, 1780-1783 (1991).
11. H. Zhang, AS. Dvornikov, E.P. Walker, N.H. Kim, F.B. McCormick, "Single-beam two-photon-recorded monolithic multi-layer optical disks," Proc. SPIE 4090, 174-178 (2000).
12. P. J. Flory, in Principles of Polymer Chemistry. (Cornell University Press, Ithaca, 1953).
13. W. J. Gambogi, A. M. Weber and T. J. Trout, "Advances and Applications of DuPont Holographic Photopolymers," Proc. SPIE 2043, 2-13, (1993).
14. L. Dhar, A. Hale, H. E. Katz, M. L. Schilling, M. G. Schnoes, and F. C. Schilling, "Recording media that exhibit high dynamic range for digital holographic data storage", Optics Letters 24, 487-489, (1999).
15. D. A. Waldman, R. T. Ingwall, P. K. Dhal, M. G. Horner, E. S. Kolb, H.-Y. S. Li, R. A. Minns, and H. G. Schild. "Cationic ring-opening photopolymerimization methods for volume hologram recording," Proc SPIE 2689, 127-141, (1996).
16. J. T. Sheridan and J. R. Lawrence, "Nonlocal-response diffusion model of holographic recording in photopolymer," JOSA 17, 1108-1114, (2000)
17. R. R. McLeod, A. J. Daiber, M. E. McDonald, T. L. Robertson, T. Slagle, S. L. Sochava, and L. Hesselink, "Microholographic multilayer optical disk data storage," Applied Optics 44, 3197-3207, (2005).