Effect of deposition temperature on the structural and physical properties of SrRuO3 films fabricated by magnetron sputtering

Rengong Jingti Xuebao/Journal of Synthetic Crystals

Volumn 39, Issue 1, 2010, Pages

  Wang, Kuan Mao ^a   Zhang, Cang Sheng ^a   Li, Man ^a   Zhou, Yang ^a   Wang, Yu Qiang ^a   Wang, Xia ^a   Peng, Ying Cai ^a   Liu, Bao Ting ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

Epitaxial flim; Magnetron sputtering; SrRuO3

Indexed keywords

ATOMIC FORCE MICROSCOPES; DEPOSITION TEMPERATURES; EPITAXIAL FLIM; EPITAXIALLY GROWN; FOUR-PROBE; POLYCRYSTALLINE; RF MAGNETRON SPUTTERING METHOD; SRTIO; STRUCTURAL AND PHYSICAL PROPERTIES;

MAGNETRON SPUTTERING; PHYSICAL PROPERTIES; STRONTIUM ALLOYS; THIN FILMS; X RAY DIFFRACTION;

DEPOSITION;

EID: 77951434532     PISSN: 1000985X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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