Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 132-137

  An, Ilsin ^a   Zapien, J A ^a   Chen, Chi ^a   Ferlauto, A S ^a   Lawrence, A S ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Data reduction; Ellipsometer calibration; Rotating compensator multichannel ellipsometry; Stokes vector ellipsometry; Ultraviolet ellipsometry

Indexed keywords

CALIBRATION; DATA REDUCTION; POLARIZATION; REAL TIME SYSTEMS; ROTATION; SORTING; VECTORS;

ELLIPSOMETRY CALIBRATION; ROTATING-COMPENSATOR MULTICHANNEL ELLIPSOMETRY; STOKES VECTOR ELLIPSOMETRY; ULTRAVIOLET ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 17144470035     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.221     Document Type: Conference Paper

References (14)

1. Hauge P.S. Surf. Sci. 96:1980;108.
2. Lee J., Rovira P.I., An I., Collins R.W. Appl. Phys. Lett. 72:1998;900.
3. Lee J., Rovira P.I., An I., Collins R.W. Rev. Sci. Instrum. 69:1998;1800.
4. Zapien J.A., Collins R.W., Messier R. Rev. Sci. Instrum. 71:2000;3451.
5. Kleim R., Kuntzler L., El-Ghemmaz A. J. Opt. Soc. Am. A. 11:1994;2550.
6. Lee J., Rovira P.I., An I., Collins R.W. J. Opt. Soc. Am. A. 18:2001;1980.
7. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. 1977;North-Holland, Amsterdam.
8. Lee J., Collins R.W. Appl. Opt. 37:1999;4230.
9. Rovira P.I., Collins R.W. J. Appl. Phys. 85:1999;2015.
10. Nee S.-M.F. Appl. Opt. 35:1996;3570.
11. Rossow U. Thin Solid Films. 313/314:1998;97.
12. An I., Collins R.W. Rev. Sci. Instrum. 62:1991;1904.
13. Russev S.H. Appl. Opt. 28:1989;1504.
14. Aspnes D.E. Appl. Opt. 10:1971;2545.