Thermal actuation of high frequency micromechanical resonators

Proceedings - IEEE International SOI Conference

Volumn , Issue , 2009, Pages

  Rahafrooz, Amir ^a   Hajjam, Arash ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH FREQUENCY; HIGH FREQUENCY HF; HIGHER FREQUENCIES; MICROMECHANICAL RESONATOR; NANO METER RANGE; PIEZO-RESISTIVE; QUALITY FACTORS; RESONANCE FREQUENCIES; RESONATOR STRUCTURES; SINGLE CRYSTAL SILICON; SINGLE-MASK; SOI SUBSTRATES; THERMAL ACTUATION;

MASKS; RESONANCE; SILICON WAFERS; SINGLE CRYSTALS;

RESONATORS;

EID: 72449194350     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2009.5318786     Document Type: Conference Paper

References (3)

1. S. Pourkamali, et al, "Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators," IEEE Transactions on Electron Devices, Vol. 54, No. 8, 2007, pp.2017-2023.
2. J. H. Seo and O. Brand, "High Q-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment," JMEMS 2008, Vol. 17, issue 2, pp. 483-493.
3. G.K. Ho, et al, "Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators," proceedings, MEMS'05, pp. 116-120.