Development of a compact, high load PZT-ceramic, long-travel, linear actuator with picometer resolution for active optical alignment applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6273 I, Issue , 2006, Pages

  Marth, H ^a   Lula, B ^b  

^a Leiter Markt und Produkte   (Germany)

^b PI ^*  (United States)

Author keywords

Nano positioning; NEXLINE ; Optical alignment; Piezo actuators

Indexed keywords

ACTIVE OPTICS; NANOPOSITIONING; OPTICAL ALIGNMENT; PICOMETER RESOLUTION; PIEZO ACTUATORS;

ALIGNMENT; ASSEMBLY; BANDWIDTH; CERAMIC MATERIALS; EMBEDDED SYSTEMS; OPTICAL RESOLVING POWER;

ACTUATORS;

EID: 33749589744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.671984     Document Type: Conference Paper

References (3)

1. K. Lorell et al; "Design and preliminary test of precision segment positioning actuator for the California Extremely Large Telescope", Proceedings of the SPIE, Volume 4840, pp. 471-484 (2003).
2. United States Patent 6,800,984, "Piezo linear drive with a group of piezo actuator stacks as well as method for operating such a drive", October 5, 2004
3. Pitz, E. et al; "Five-axis secondary system for UKIRT", Proc SPIE Conf. on Advanced Technology Optical Telescopes V", ed. L.D. Barr, 2199, 516-522, 1994.