Artificial neural networks for instantaneous analysis of real-time Rutherford backscattering spectra

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 10, 2010, Pages 1676-1681

  Demeulemeester, J ^a   Smeets, D ^a   Barradas, N P ^b,c   Vieira, A ^d   Comrie, C M ^e   Temst, K ^a   Vantomme, A ^a  

^a KU LEUVEN   (Belgium)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^c CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^d INSTITUTO SUPERIOR DE ENGENHARIA DO PORTO   (Portugal)

^e UNIVERSITY OF CAPE TOWN   (South Africa)

Author keywords

Artificial neural networks; Growth kinetics; IBA software; Ni silicides; RBS analysis; Real time RBS

Indexed keywords

A-THERMAL; ARTIFICIAL NEURAL NETWORK; ARTIFICIAL NEURAL NETWORKS; DATA SETS; IN-SITU; LARGE DATASETS; NI FILMS; NI SILICIDE; RBS ANALYSIS; RUTHERFORD BACKSCATTERING SPECTRA; RUTHERFORD BACKSCATTERING SPECTROMETRY; SI(1 0 0); TEST CASE; TIME INTERVAL;

BACKSCATTERING; BIOACTIVITY; COMPUTER SOFTWARE; FILM GROWTH; GROWTH KINETICS; NICKEL COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICIDES;

NEURAL NETWORKS;

EID: 77951023071     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.127     Document Type: Article

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