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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 48-55

Real-time RBS of solid-state reaction in thin films

(3) Theron, C C a Lombaard, J C b Pretorius, R a

a NATIONAL ACCELERATOR CENTRE (South Africa)

b STELLENBOSCH UNIVERSITY (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIFFERENTIAL THERMAL ANALYSIS; OXYGEN; REACTION KINETICS; TEMPERATURE; THIN FILMS;

MARKERS; SOLID STATE REACTION;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0033906551 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(99)00882-4 Document Type: Article

Times cited : (18)

References (43)

1
- 0342602521
- K.P. Rodbell, K.N. Tu, W.A. Lanford, X.S. Guo, Phys. Rev. B 43 (1991) 1422.
- (1991) Phys. Rev. B , vol.43 , pp. 1422
- Rodbell, K.P.¹ Tu, K.N.² Lanford, W.A.³ Guo, X.S.⁴

2
- 20444388279
- E.G. Colgan, C. Cabral Jr., D.E. Kotecki, J. Appl. Phys. 77 (1995) 614.
- (1995) J. Appl. Phys. , vol.77 , pp. 614
- Colgan, E.G.¹ Cabral Jr., C.² Kotecki, D.E.³

3
- 0029358227
- E.G. Colgan, J. Mater. Res. 10 (1995) 1953.
- (1995) J. Mater. Res. , vol.10 , pp. 1953
- Colgan, E.G.¹

4
- 0030163952
- E.G. Colgan, Thin Solid Films 279 (1996) 193.
- (1996) Thin Solid Films , vol.279 , pp. 193
- Colgan, E.G.¹

5
- 0012932899
- E.G. Colgan, F.M. d'Heurle, J. Appl. Phys. 79 (1996) 4087.
- (1996) J. Appl. Phys. , vol.79 , pp. 4087
- Colgan, E.G.¹ D'Heurle, F.M.²

6
- 0029255035
- S.-L. Zhang, F.M. d'Heurle, Thin Solid Films 256 (1995) 155.
- (1995) Thin Solid Films , vol.256 , pp. 155
- Zhang, S.-L.¹ D'Heurle, F.M.²

7
- 0030168809
- S.-L. Zhang, F.M. d'Heurle, Thin Solid Films 279 (1996) 248.
- (1996) Thin Solid Films , vol.279 , pp. 248
- Zhang, S.-L.¹ D'Heurle, F.M.²

8
- 0004830033
- M. Epple, H.K. Cammmenga, Ber. Bunsenges. Phys. Chem. 96 (1992) 1774.
- (1992) Ber. Bunsenges. Phys. Chem. , vol.96 , pp. 1774
- Epple, M.¹ Cammmenga, H.K.²

9
- 0038126138
- K.F. Dreyer, W.K. Neils, R.R. Chromik, D. Grosman, E.J. Cotts, Appl. Phys. Lett. 67 (1995) 2795.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2795
- Dreyer, K.F.¹ Neils, W.K.² Chromik, R.R.³ Grosman, D.⁴ Cotts, E.J.⁵

10
- 0001385783
- P. Knauth, A. Charaï, C. Bergman, P. Gas, J. Appl. Phys. 76 (1994) 5195.
- (1994) J. Appl. Phys. , vol.76 , pp. 5195
- Knauth, P.¹ Charaï, A.² Bergman, C.³ Gas, P.⁴

11
- 33847560573
- O. Meyer, G. Linker, F. Käpeller (Eds.), Plenum Press, New York
- J.E.E. Baglin, W.N. Hammer, in: O. Meyer, G. Linker, F. Käpeller (Eds.), Ion Beam Surface Layer Analysis, Plenum Press, New York, 1976, p. 447.
- (1976) Ion Beam Surface Layer Analysis , pp. 447
- Baglin, J.E.E.¹ Hammer, W.N.²

12
- 0018305938
- J.E.E. Baglin, F.M. D'Heurle, W.N. Hammer, J. Appl. Phys. 50 (1979) 266.
- (1979) J. Appl. Phys. , vol.50 , pp. 266
- Baglin, J.E.E.¹ D'Heurle, F.M.² Hammer, W.N.³

13
- 0026259033
- G.J. Leusink, T.G.M. Oosterlaken, C.A. Vander Jeugd, G.C.A.M. Janssen, S. Radelaar, Appl. Surf. Sci. 53 (1991) 47.
- (1991) Appl. Surf. Sci. , vol.53 , pp. 47
- Leusink, G.J.¹ Oosterlaken, T.G.M.² Vander Jeugd, C.A.³ Janssen, G.C.A.M.⁴ Radelaar, S.⁵

14
- 0028381249
- A. Torrisi, J.P.W.B. Duchateau, G.J. Vander Kolk, J. Electrochem. Soc. 141 (1994) 519.
- (1994) J. Electrochem. Soc. , vol.141 , pp. 519
- Torrisi, A.¹ Duchateau, J.P.W.B.² Vander Kolk, G.J.³

15
- 0022075813
- L.R. Doolittle, Nucl. Instr. and Meth. B 9 (1985) 344.
- (1985) Nucl. Instr. and Meth. B , vol.9 , pp. 344
- Doolittle, L.R.¹

16
- 0022041248
- L.R. Doolittle, Nucl. Instr. and Meth. B 15 (1986) 227.
- (1986) Nucl. Instr. and Meth. B , vol.15 , pp. 227
- Doolittle, L.R.¹

17
- 0032042644
- C.C. Theron, J.A. Mars, C.L. Churms, J. Farmer, R. Pretorius, Nucl. Instr. and Meth. B 139 (1998) 213.
- (1998) Nucl. Instr. and Meth. B , vol.139 , pp. 213
- Theron, C.C.¹ Mars, J.A.² Churms, C.L.³ Farmer, J.⁴ Pretorius, R.⁵

18
- 85031598730
- Ph.D. Thesis, University of Stellenbosch, South Africa
- C.C. Theron, Ph.D. Thesis, University of Stellenbosch, South Africa (1997).
- (1997)
- Theron, C.C.¹

19
- 0042858106
- Solid State Reactions
- Verlag Chemie, Weinheim, 2nd ed.
- H. Schmalzried, Solid State Reactions, Vol. 12 of Monographs in Modern Chemistry. Verlag Chemie, Weinheim, 2nd ed., 1981.
- (1981) Monographs in Modern Chemistry , vol.12
- Schmalzried, H.¹

20
- 0022561250
- F.M. d'Heurle, P. Gas, J. Mater. Res. 1 (1986) 205.
- (1986) J. Mater. Res. , vol.1 , pp. 205
- D'Heurle, F.M.¹ Gas, P.²

21
- 0006934886
- J. Tardy, K.N. Tu, Phys. Rev. B 32 (1985) 2070.
- (1985) Phys. Rev. B , vol.32 , pp. 2070
- Tardy, J.¹ Tu, K.N.²

22
- 0022700062
- E.J. Mittemeijer, L. Cheng, P.J.V. der Schaaf, C.M. Brakman, B.M. Korevaar, Metall. Trans. A 19 (1988) 925.
- (1988) Metall. Trans. A , vol.19 , pp. 925
- Mittemeijer, E.J.¹ Cheng, L.² Der Schaaf, P.J.V.³ Brakman, C.M.⁴ Korevaar, B.M.⁵

23
- 33749213901
- H.E. Kissinger, Anal. Chem. 29 (1957) 1702.
- (1957) Anal. Chem. , vol.29 , pp. 1702
- Kissinger, H.E.¹

24
- 0022766515
- E.J. Mittemeijer, A.V. Gent, P.J.V. der Schaaf, Metall. Trans. A 17 (1986) 1441.
- (1986) Metall. Trans. A , vol.17 , pp. 1441
- Mittemeijer, E.J.¹ Gent, A.V.² Der Schaaf, P.J.V.³

25
- 51249173803
- H.C. Baxi, T.B. Massalski, J. Phase Equilibria 12 (1991) 349.
- (1991) J. Phase Equilibria , vol.12 , pp. 349
- Baxi, H.C.¹ Massalski, T.B.²

26
- 0343818926
- K.T. Ho, C.-D. Lien, U. Shreter, M.-A. Nicolet, J. Appl. Phys. 57 (1985) 227.
- (1985) J. Appl. Phys. , vol.57 , pp. 227
- Ho, K.T.¹ Lien, C.-D.² Shreter, U.³ Nicolet, M.-A.⁴

27
- 0342947799
- C.M. Comrie, J.C. Liu, L.S. Hung, J.W. Mayer, J. Appl. Phys. 63 (1988) 2402.
- (1988) J. Appl. Phys. , vol.63 , pp. 2402
- Comrie, C.M.¹ Liu, J.C.² Hung, L.S.³ Mayer, J.W.⁴

28
- 0346164881
- A. Atkinson, Rev. Modern Phys. 57 (1985) 437.
- (1985) Rev. Modern Phys. , vol.57 , pp. 437
- Atkinson, A.¹

29
- 0020140629
- C.-D. Lien, L.S. Wielunski, M.-A. Nicolet, K.M. Stika, Thin Solid Films 104 (1983) 235.
- (1983) Thin Solid Films , vol.104 , pp. 235
- Lien, C.-D.¹ Wielunski, L.S.² Nicolet, M.-A.³ Stika, K.M.⁴

30
- 0022418431
- M. Natan, S.W. Duncan, Thin Solid Films 123 (1985) 69.
- (1985) Thin Solid Films , vol.123 , pp. 69
- Natan, M.¹ Duncan, S.W.²

31
- 0018943815
- A. Martinez, D. Esteve, A. Guivarc'h, P. Auvray, P. Henoc, G. Pelous, Sol. State Electron. 23 (1980) 55.
- (1980) Sol. State Electron. , vol.23 , pp. 55
- Martinez, A.¹ Esteve, D.² Guivarc'h, A.³ Auvray, P.⁴ Henoc, P.⁵ Pelous, G.⁶

32
- 0343472571
- O. Thomas, L. Stolt, P. Buaud, J.C. Poler, F.M. d'Heurle, J. Appl. Phys. 68 (1990) 6213.
- (1990) J. Appl. Phys. , vol.68 , pp. 6213
- Thomas, O.¹ Stolt, L.² Buaud, P.³ Poler, J.C.⁴ D'Heurle, F.M.⁵

33
- 0001631347
- K. Affolter, X.-A. Zhao, M.-A. Nicolet, J. Appl. Phys. 58 (1985) 3087.
- (1985) J. Appl. Phys. , vol.58 , pp. 3087
- Affolter, K.¹ Zhao, X.-A.² Nicolet, M.-A.³

34
- 0002190489
- L.S. Hung, J.W. Mayer, C.S. Pai, S.S. Lau, J. Appl. Phys. 58 (1985) 1527.
- (1985) J. Appl. Phys. , vol.58 , pp. 1527
- Hung, L.S.¹ Mayer, J.W.² Pai, C.S.³ Lau, S.S.⁴

35
- 0019876146
- A.P. Botha, R. Pretorius, Thin Solid Films 93 (1982) 127.
- (1982) Thin Solid Films , vol.93 , pp. 127
- Botha, A.P.¹ Pretorius, R.²

36
- 0343472569
- A.P. Botha, R. Pretorius, S. Kritzinger, Appl. Phys. Lett. 40 (1982) 412.
- (1982) Appl. Phys. Lett. , vol.40 , pp. 412
- Botha, A.P.¹ Pretorius, R.² Kritzinger, S.³

37
- 0020115448
- U. Gösele, K.N. Tu, J. Appl. Phys. 53 (1982) 3252.
- (1982) J. Appl. Phys. , vol.53 , pp. 3252
- Gösele, U.¹ Tu, K.N.²

38
- 0027695225
- R. Pretorius, C.C. Theron, T.K. Marais, H.A. Ras, Mater. Chem. Phys. 36 (1993) 31.
- (1993) Mater. Chem. Phys. , vol.36 , pp. 31
- Pretorius, R.¹ Theron, C.C.² Marais, T.K.³ Ras, H.A.⁴

39
- 85031610510
- Master's thesis, University of Stellenbosch, South Africa
- C.C. Theron, Master's thesis, University of Stellenbosch, South Africa, 1994.
- (1994)
- Theron, C.C.¹

40
- 85031609019
- Ph.D. Thesis, University of Stellenbosch, South Africa
- H.A. Ras, Ph.D. Thesis, University of Stellenbosch, South Africa (1987).
- (1987)
- Ras, H.A.¹

41
- 0016472843
- K.N. Tu, W.K. Chu, J.W. Mayer, Thin Solid Films 25 (1975) 403.
- (1975) Thin Solid Films , vol.25 , pp. 403
- Tu, K.N.¹ Chu, W.K.² Mayer, J.W.³

42
- 0000822604
- J.O. Olowolafe, M.-A. Nicolet, J.W. Mayer, Thin Solid Films 38 (1976) 143.
- (1976) Thin Solid Films , vol.38 , pp. 143
- Olowolafe, J.O.¹ Nicolet, M.-A.² Mayer, J.W.³

43
- 0021444627
- F.M. d'Heurle, C.S. Petersson, J.E.E. Baglin, S.J.L. Placa, C.Y. Wong, J. Appl. Phys. 55 (1984) 4208.
- (1984) J. Appl. Phys. , vol.55 , pp. 4208
- D'Heurle, F.M.¹ Petersson, C.S.² Baglin, J.E.E.³ Placa, S.J.L.⁴ Wong, C.Y.⁵

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