Metal nanojunctions on silicon single nanowire devices

2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009

Volumn , Issue , 2009, Pages 295-298

  Pennelli, Giovanni ^a   Piotto, Massimo ^b  

^a UNIVERSITY OF PISA   (Italy)

^b CNR   (Italy)

Author keywords

Field effect device; Nanojunction; Silicon nanowire

Indexed keywords

DIRECT-PATTERNING; ELECTRICAL CHARACTERIZATION; FIELD-EFFECT DEVICES; METAL GATE; NANO SCALE; NANOJUNCTIONS; OXIDE ETCHING; ROOM TEMPERATURE; SILICON ANISOTROPIC ETCHING; SILICON DIOXIDE; SILICON NANOWIRES; SILICON-ON-INSULATOR SUBSTRATES; SINGLE NANOWIRES; THERMAL OXIDATION; TOP-DOWN PROCESS;

ELECTRIC WIRE; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ETCHING; FIELD EFFECT TRANSISTORS; NANOWIRES; SILICA;

NANOTECHNOLOGY;

EID: 77951018613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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