Fast, high bit number pattern generator for electron and ion beam lithographies

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Pennelli, Giovanni ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; DATA TRANSFER; ELECTRONS; SCANNING PROBE MICROSCOPY; VOLTAGE CONTROL;

NANOMANIPULATION; PATTERN GENERATORS;

ION BEAM LITHOGRAPHY;

EID: 41549110283     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2894213     Document Type: Article

References (14)

1. SPIE Handbook of Microlithography, Micromachining and Microfabriation, edited by, P. Ray-Choudhury, (CSPIE, Bellingham, WA, 1997), Vol. 1, Chap..
2. G. Augke, W. Eberhardt, C. Single, F. E. Prins, D. A. Wharam, and D. P. Kern, Appl. Phys. Lett. 76, 2065 (2000).
3. G. Pennelli and M. Piotto, J. Appl. Phys. 100, 054507 (2006).
4. N. R. Franklin, Y. Li, R. J. Chen, A. Javey, and H. Day, Appl. Phys. Lett. 79, 4571 (2001).
5. J. Westmaster, D. P. Gosain, S. Tomiya, and S. Usui, J. Vac. Sci. Technol. B 15, 554 (1997).
6. For a reference on FIB see, for example, Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice, edited by, L. A. Giannuzzi, (Springer, New York, 2005).
7. J. Gierak, E. Bourhis, M. N. Merat Combes, Y. Chriqui, I. Sagnes, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prevel, A. Hannour, P. Melinon, A. Perez, J. Ferre', J. P. Jamet, A. Mougin, C. Chappert, and V. Mathet, Microelectron. Eng. 78-79, 266 (2005).
8. V. Sivakov, F. Heyroth, F. Falk, G. Andra, and S. Christiansen, J. Cryst. Growth 300, 288 (2007).
9. J. Kong, H. T. Soh, A. M. Cassel, C. F. Quatr, and H. Day, Nature (London) 395, 878 (1998).
10. E. Dubois and J.-L. Bubbendorff, Solid-State Electron. 43, 1085 (1999).
11. D. Stievenard and B. Legrand, Prog. Surf. Sci. 81, 112 (2006).
12. J. C. Nabity and M. N. Wybourne, Rev. Sci. Instrum. 60, 27 (1989).
13. S. Straehle, K. D. Schock, F. E. Prins, and D. P. Kern, Microelectron. Eng. 35, 465 (1997).
14. G. Pennelli, F. D'Angelo, M. Piotto, G. Barillaro, and B. Pellegrini, Rev. Sci. Instrum. 74, 3579 (2003).