Silicon Nanowire array bio-sensor using top-down CMOS technology

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1051-1054

  Agarwal, Ajay ^a   Lao, I K ^a   Buddharaju, K ^a   Singh, N ^a   Balasubramanian, N ^a   Kwong, D L ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Bio chemical sensor; CMOS compatible; Field effect transistors (FET); Silicon nanowires

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; CHLORINE COMPOUNDS; DNA; ELECTRIC WIRE; GENES; MICROSYSTEMS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; NONMETALS; NUCLEIC ACIDS; OPTICAL DESIGN; ORGANIC ACIDS; SEMICONDUCTING SILICON; SILICON; STANDARDS; TECHNOLOGY; TRANSDUCERS;

ANALYTES; BIO-CHEMICAL SENSOR; BIO-CHEMICAL SENSORS; BIOTINYLATED; BUFFER SOLUTIONS; CMOS COMPATIBLE; CMOS TECHNOLOGIES; COMPLEX DISEASES; DNA HYBRIDIZATIONS; DNA PROBES; FIELD EFFECT TRANSISTORS (FET); HIGH-DENSITY; HIGHLY SENSITIVE; INTERNATIONAL CONFERENCES; LABEL-FREE; MASS FABRICATION; MICRO-FLUIDICS; NANOWIRE SENSORS; SILICON NANOWIRE ARRAY; SILICON NANOWIRE ARRAYS; SILICON NANOWIRES; SOLID-STATE SENSORS; STANDARD CMOS; STATISTICAL ANALYSIS; STREPTAVIDIN; SURFACE MODIFICATIONS; TOP-DOWN;

SENSORS;

EID: 50049089047     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300314     Document Type: Conference Paper

References (6)

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