Micro preconcentrator with seedless electroplated gold as self-heating adsorbent

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 1947-1950

  Alfeeli, Bassam ^a   Zareian Jahromi, Mohammad A ^b   Agah, Masoud ^b  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b Virginia Polytechnic Institute and State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1-PROPANOL; ADSORBENT MATERIALS; DESORPTION EFFICIENCY; ELECTROPLATED GOLD; GOLD LAYER; HIGH ADSORPTION CAPACITY; HIGH ASPECT RATIO; HIGH SURFACE-TO-VOLUME RATIO; INNER SURFACES; MICROFABRICATED; ON CHIPS; PERFORMANCE METRICES; POWER CONSUMPTION; PRE-CONCENTRATION; PRE-CONCENTRATOR; PRECONCENTRATORS; RESISTIVE HEATERS; SAMPLE DISTRIBUTIONS; SELF-HEATING; SILICON MICROSTRUCTURES;

ACETONE; ADSORPTION; ASPECT RATIO; DESORPTION; GOLD; HEATING; METHANOL; MICROCOMPUTERS; SENSORS;

GOLD COATINGS;

EID: 77950627922     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398342     Document Type: Conference Paper

References (18)

1. B. Alfeeli, and M. Agah, "MEMS-Based Selective Preconcentration of Trace Level Breath Analytes," IEEE Sensors Journal, 2009, In press.
2. Y. Tang, J. Yeom, J. Han, B. Bae, R. I. Masel, and M. A. Shannon, "A Micro-post preconcentrator for a microscale gas chromatography system," in 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Boston, MA, 2005, pp. 660-662.
3. R. R. Lima, R. A. M. Carvalho, A. P. N. Filho, M. L. P. Silva, and N. R. Demarquette, "Production and deposition of adsorbent films by plasma polymerization on low cost micromachined non-planar microchannels for preconcentration of organic compound in air," Sensors and Actuators B: Chemical, vol.108, no.1-2, pp. 435-444, 2005. (Pubitemid 40743725)
4. I. Gràcia, P. Ivanov, F. Blanco, N. Sabaté, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, and C. Cané, "Sub-ppm gas sensor detection via spiral μ-preconcentrator," Sensors and Actuators B: Chemical vol.132, no.1, pp. 149-154, 2008.
5. B. Alfeeli, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "Multi-inlet/outlet Preconcentrator with 3-D μ-structures Coated by Inkjet Printing of Tenax TA " in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, 2008, pp. 118-121.
6. M. Agah, J. A. Potkay, G. Lambertus, R. Sacks, and K. D. Wise, "High-Performance Temperature-Programmed Microfabricated Gas Chromatography Columns," Journal of Microelectromechanical Systems, vol.14, no.5, pp. 1039-1050, 2005. (Pubitemid 41555295)
7. M. Agah, G. R. Lambertus, R. Sacks, and K. Wise, "High-speed MEMS-based gas chromatography," Journal of Microelectromechanical Systems, vol.15, no.5, pp. 1371-1378, 2006.
8. M. Agah, and K. D. Wise, "Low-Mass PECVD Oxynitride Gas Chromatographic Columns," Journal of Microelectromechanical Systems, vol.16, no.4, pp. 853-860, 2007.
9. M. A. Zareian-Jahromi, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "Design, Modeling, and Fabrication of MEMS-Based Multicapillary Gas Chromatographic Columns," Microelectromechanical Systems, Journal of, vol.18, no.1, pp. 28-37, 2009.
10. B. Alfeeli, S. Ali, V. Jain, R. Montazami, J. Heflin, and M. Agah, "MEMS-based gas chromatography columns with nano-structured stationary phases," in The 7th IEEE Conference on Sensors, Lecce, Italy 2008, pp. 728-731.
11. M. A. Zareian-Jahromi, and M. Agah, "Micro Gas Chromatography Multicapillary Columns with Mono-Layer Protected Gold as a Stationary," in 22nd Annual IEEE Conference on Micro Electro Mechanical Systems, Sorrento, Italy, 2009, pp. 288-291.
12. S. Ali, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "MEMS-based Semi-Packed Gas Chromatography Columns," Sensors and Actuators B, Chemical 2009 (In press).
13. B. Alfeeli, and M. Agah, "Selective Preconcentration by Temperature Manipulation of Cascaded Micro Preconcentrators," in 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 2009, pp. 1662-1665.
14. R. P. Manginell, D. R. Adkins, M. W. Moorman, R. Hadizadeh, D. Copic, D. A. Porter, J. M. Anderson, V. M. Hietala, J. R. Bryan, D. R. Wheeler, K. B. Pfeifer, and A. Rumpf, "Mass-Sensitive Microfabricated Chemical Preconcentrator," Microelectromechanical Systems, Journal of, vol.17, no.6, pp. 1396-1407, 2008.
15. W.-C. Tian, H. K. L. Chan, L. Chia-Jung, S. W. Pang, and E. T. Zellers, "Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system," Journal of Microelectromechanical Systems, vol.14, no.3, pp. 498-507, 2005.
16. I. Voiculescu, R. A. McGill, M. E. Zaghloul, D. Mott, J. Stepnowski, S. Stepnowski, H. Summers, V. Nguyen, S. Ross, K. Walsh, and M. Martin, "Micropreconcentrator for Enhanced Trace Detection of Explosives and Chemical Agents," IEEE Sensors Journal, vol.6, no.5, pp. 1094-1104, 2006.
17. B. Alfeeli, D. Cho, M. Ashraf-Khorassani, L. T. Taylor, and M. Agah, "MEMS-Based Multi-Inlet/Outlet Preconcentrator Coated by Inkjet Printing of Polymer Adsorbents," Sensors and Actuators B: Chemical vol.133, no.1, pp. 24-32, 2008.
18. M. A. Zareian-Jahromi, and M. Agah, "Self-Patterned Seedless Gold Electroplating in High-aspect-ratio Channels for GC Application," in 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 2009, pp. 160-163.