MEMS-based gas chromatography columns with nano-structured stationary phases

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 728-731

  Alfeeli, Bassam ^a   Ali, Syed ^a   Jain, Vaibhav ^b   Montazami, Reza ^c   Heflin, James ^d   Agah, Masoud ^e  

^a Bradley Department of Electrical and Computer Engineering   (United States)

^b Macromolecular Science and Engineering   (United States)

^c Materials Science and Engineering

^d VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^e NONE

Author keywords

[No Author keywords available]

Indexed keywords

FAST MASS TRANSFER; FUNCTIONALIZED; GAS CHROMATOGRAPHY COLUMN; GOLD NANOPARTICLES; HOMOGENEOUS PHASE; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MODIFIED LAYER; NANO-STRUCTURED; NANOMETER RESOLUTIONS; NARROW WIDTH; SEPARATION EFFICIENCY; SILICON SURFACES; STATIONARY PHASE; STATIONARY PHASIS; THIN LAYERS; TRADITIONAL TECHNIQUES;

COMPOSITE MICROMECHANICS; GAS CHROMATOGRAPHY; GAS PERMEABLE MEMBRANES; GOLD DEPOSITS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOPARTICLES; PARAFFINS; SENSORS; SILICON NITRIDE;

CHROMATOGRAPHIC ANALYSIS;

EID: 67649909544     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716545     Document Type: Conference Paper

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