Production and deposition of adsorbent films by plasma polymerization on low cost micromachined non-planar microchannels for preconcentration of organic compound in air

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 435-444

  Lima, Roberto Rocha ^a   Carvalho, Rodrigo Amorim Motta ^a   Nascimento Filho, Antonio Pereira ^a   Silva, Maria Lucia Pereira ^a   Demarquette, Nicole Raymond ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Organic compound; Plasma polymerization; Preconcentrator; Sensor

Indexed keywords

ACETONE; ADSORBENTS; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONIC PROCESSING; MICROMACHINING; PIEZOELECTRIC DEVICES; PLASMA POLYMERIZATION; POLYMERIZATION; QUARTZ; SENSORS; THIN FILMS;

MICROELECTROMECHANICAL SYSTEMS; PRECONCENTRATOR; PROTEOMICS; THIN FILM PLASMA DEPOSITION;

ORGANIC COMPOUNDS;

EID: 19744373108     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.11.023     Document Type: Conference Paper

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