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Volumn , Issue , 2009, Pages 288-291

μGC multicapillary columns with mono-layer protected gold as a stationary phase

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL COATINGS; CONVENTIONAL COATINGS; FUNCTIONALIZED; FUSED-SILICA CAPILLARIES; GOLD LAYER; HIGH ASPECT RATIO STRUCTURES; MICROFABRICATED; MULTI-CAPILLARY COLUMNS; MULTICAPILLARY; POLYMERIC SOLUTION; SEPARATION PERFORMANCE; SOLVENT EVAPORATION; STATIONARY PHASE; WAFER LEVEL;

EID: 65949099746     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805375     Document Type: Conference Paper
Times cited : (5)

References (10)
  • 2
    • 34548019974 scopus 로고    scopus 로고
    • Low-mass PECVD oxynitride gas chromatographic columns
    • DOI 10.1109/JMEMS.2007.893515
    • M. Agah and K. D. Wise, "Low-mass PECVD oxynitride gas chromatographic columns," Journal of Microelectromechanical Systems, vol. 16, pp. 853-860, 2007. (Pubitemid 47278829)
    • (2007) Journal of Microelectromechanical Systems , vol.16 , Issue.4 , pp. 853-860
    • Agah, M.1    Wise, K.D.2
  • 9
    • 0018653907 scopus 로고
    • A gas chromatographic air analyzer fabricated on a silicon wafer
    • S. C. Terry, J. H. Jerman, and J. B. Angell, "A gas chromatographic air analyzer fabricated on a silicon wafer," Electron Devices, IEEE Transactions on, vol. 26, pp. 1880-1886, 1979. (Pubitemid 10128644)
    • (1979) IEEE Transactions on Electron Devices , vol.26 , Issue.12 , pp. 1880-1886
    • Terry, S.C.1    Jerman, J.H.2    Angell, J.B.3
  • 10
    • 33947248074 scopus 로고    scopus 로고
    • Seedlayer-less gold electroplating on silicon surface for MEMS applications
    • DOI 10.1016/j.sna.2006.10.058, PII S0924424706006911, Special Issue of The Micromechanics section of Sensors and Actuators
    • T. Fujita, S. Nakamichi, S. Ioku, K. Maenaka, and Y. Takayama, "Seedlayer-less gold electroplating on silicon surface for MEMS applications," Sensors and Actuators A: Physical, vol. 135, pp. 50-57, 2007. (Pubitemid 46428111)
    • (2007) Sensors and Actuators, A: Physical , vol.135 , Issue.1 , pp. 50-57
    • Fujita, T.1    Nakamichi, S.2    Ioku, S.3    Maenaka, K.4    Takayama, Y.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.