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Journal of Vacuum Science and Technology B

Volumn 28, Issue 2, 2010, Pages 371-375

Two step optimized process for scanning tunneling microscopy tip fabrication

(4) Bastiman, F a Cullis, A G a Hopkinson, M a Briston, K J a

a UNIVERSITY OF SHEFFIELD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURVE FITTING;

E-BEAMS; ETCH PROCESS; ETCHING PARAMETERS; OPTIMISATIONS; OPTIMIZED PROCESS; OXIDES REMOVAL; POST-ETCH CLEANING; RADII OF CURVATURE; TWO-STEP PROCEDURE; ULTRASHARP TIPS;

SCANNING TUNNELING MICROSCOPY;

EID: 77950572873 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3359608 Document Type: Article

Times cited : (9)

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