High temperature and frequency pressure sensor based on silicon-on-insulator layers

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 519-523

  Zhao, Y L ^a   Zhao, L B ^a   Jiang, Z D ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

High frequency response; High temperature; Pressure sensor; SOI strain gauge

Indexed keywords

AEROSPACE APPLICATIONS; AVIATION; FABRICATION; FREQUENCY RESPONSE; GLASS BONDING; HIGH TEMPERATURE EFFECTS; LEAKAGE CURRENTS; PRESSURE EFFECTS; SILICA; SILICON ON INSULATOR TECHNOLOGY; STRAIN;

HIGH FREQUENCY RESPONSE; HIGH TEMPERATURE; PRESSURE SENSOR; SOI STRAIN GAUGE;

SENSORS;

AEROSPACE APPLICATIONS; AVIATION; FABRICATION; FREQUENCY RESPONSE; GLASS BONDING; LEAKAGE CURRENTS; SENSORS; SILICA; SILICON ON INSULATOR TECHNOLOGY; STRAIN;

EID: 31644450812     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S11     Document Type: Article

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