Fabrication of MEMS components using ultrafine-grained aluminium alloys

Journal of Micromechanics and Microengineering

Volumn 20, Issue 4, 2010, Pages

  Qiao, Xiao Guang ^a   Gao, Nong ^a   Moktadir, Zakaria ^a   Kraft, Michael ^a   Starink, Marco J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COARSE-GRAINED; COLD EMBOSSING; COMMERCIAL PURITY; DEEP REACTIVE ION ETCHING; FAILURE RATE; GRAIN SIZE; HIGH THERMAL CONDUCTIVITY; HOT-EMBOSSING; METALLIC COMPONENT; MICRO-SCALE COMPONENTS; MICROELECTROMECHANICAL SYSTEMS; NOVEL PROCESS; ULTRAFINE GRAINED MATERIALS; ULTRAFINE-GRAINED ALUMINIUM ALLOY;

CERIUM ALLOYS; COMPOSITE MICROMECHANICS; EQUAL CHANNEL ANGULAR PRESSING; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MOLDS; PRESSING (FORMING); REACTIVE ION ETCHING; SILICON ALLOYS;

ALUMINUM;

EID: 77949899612     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/4/045029     Document Type: Article

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