Microforming of MEMS parts with amorphous alloys

Materials Research Society Symposium - Proceedings

Volumn 554, Issue , 1999, Pages 385-390

  Saotome, Yasunori ^a   Zhang, Tao ^b   Inoue, Akihisa ^a,b  

^a GUNMA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; LIQUID METALS; METAL EXTRUSION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NEWTONIAN FLOW; PHOTOCHEMICAL FORMING; SUPERCOOLING; VISCOUS FLOW;

MICRO DIES; MICROFORMING TECHNIQUES; SUPERCOOLED LIQUIDS;

METALLIC GLASS;

EID: 0033317427     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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