Structure of ultra-thin diamond-like carbon films grown with filtered cathodic arc on Si(001)

Analytical Sciences

Volumn 26, Issue 2, 2010, Pages 267-272

  Herrera Gomez, Alberto ^a,b   Sun, Yongjian ^c   Aguirre Tostado, Francisco Servando ^b,d   Hwang, Cherngye ^c   Mani Gonzalez, Pierre Giovanni ^a   Flint, Eric ^c   Espinosa Magaña, Francisco ^d   Wallace, Robert M ^b  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b The University of Texas at Dallas   (United States)

^c SAN JOSE RESEARCH CENTER   (United States)

^d CENTRO DE INVESTIGACIÓN EN MATERIALES AVANZADOS   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; CHEMICAL ANALYSIS; DECONVOLUTION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SILICON; SILICON CARBIDE; SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; CATHODIC ARC; CHEMICAL SPECIES; CROSS-SECTIONAL TEM; PEAK INTENSITY; SIMULTANEOUS FITTING; TAKE-OFF ANGLE; THICKNESS OF THE FILM;

DIAMOND LIKE CARBON FILMS;

EID: 77949879192     PISSN: 09106340     EISSN: 13482246     Source Type: Journal    
DOI: 10.2116/analsci.26.267     Document Type: Article

References (18)

1. X. Yan, T. Xu, G. Chen, S. Yang, and H. Liu, Appl. Surf. Sci., 2004, 236, 328.
2. F. L. Coffman, R. Cao, P. Pianetta, S. Kapoor, M. Kelly, and L. J. Terminello, Appl. Phys. Lett., 1996, 69, 568.
3. J. Y. Yan, F. R. Chen, and J. J. Kai, J. Electron Microsc., 2002, 51, 391.
4. C. S. Fadley, Prog. Surf. Sci., 1984 16, 275.
5. A. Herrera-Gomez, J. T. Grant, P. Cumpson, M. Jenko, F. S. Aguirre-Tostado, C. R. Brundle, T. Conard, G. Conti, C. S. Fadley, J. Fulghum, K. Kobayashi, L. Köver, H. Nohira, R. L. Opila, S. Oswald, R. Paynter, R. M. Wallace, W. S. M. Werner, and J. Wolstenholme, Surf. Interface Anal., 2009, 41, 840.
6. A. Herrera-Gomez, F. S. Aguirre-Tostado, Y. Sun, R. Contreras-Guerrero, R. M. Wallace, Y. Hisao, and E. Flint, Surf. Interface Anal., 2007, 39, 904, and references therein.
7. A. Herrera-Gomez, F. S. Aguirre-Tostado, M. A. Quevedo-Lopez, P. D. Kirsch, M. J. Kim, and R. M. Wallace, J. Appl. Phys., 2008, 104, 103520.
8. A. Herrera-Gomez, "Simultaneous Data Fitting in ARXPS", Internal Report, CINVESTAV-Unidad Queretaro, http://www.qro.cinvestav.mx/~aanalyzer/SimultaneousFitting.pdf.
9. J. Muñoz-Flores and A. Herrera-Gomez, J. Electron Spectrosc., submitted.
10. A. Herrera-Gomez, "AAnalyzer: an Analysis Software for Photoelectron and Infrared Spectra", http://qro.cinvestav.mx/~aanalyzer/.
11. O. R. Monteiro and M. P. Delplancke-Ogletree, Lawrence Berkeley National Laboratory, Paper LBNL-49944 2002.
12. B. K. Tay, X. Shi, H. S. Tan, and D. H. C. Chua, Surf. Interface Anal., 1999, 28, 231, and references therein.
13. A. Herrera-Gomez. "Self Consistent ARXPS Analysis for Multilayer Conformal Films with Abrupt Interfaces", Internal Report, CINVESTAV-Unidad Queretaro. http://www.qro.cinvestav.mx/~aanalyzer/arxpsAnalysisSharp Intefaces.pdf.
14. M. I. Medina-Montes, M. V. Selvidge, A. Herrera-Gomez, F. S. Aguirre-Tostado, M. A. Quevedo-Lopez, and R. M. Wallace, J. Appl. Phys., 2009, 106, 053506.
15. S. E. Borodyansky and Yu. G. Abashkin, Surf. Sci., 1991, 251, 325.
16. J. P. Chang, M. L. Green, V. M. Donnelly, R. L. Opila, J. Eng, J. Sapjeta, P. J. Silverman, B. Weir, H. C. Lu, T. Gustafsson, and E. Garfunkel, Jr., J. Appl. Phys., 2000, 87, 4449.
17. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Sci., 1987, 192, L849.
18. C. J. Powell and A. Jablonski, National Institute of Standards and Technology, Gaithersburg, MD, USA, Standard Reference Database 82, Ver. 1.0.