Sensitivity enhancement of differential splitter-based transduction for photonic microcantilever arrays

Nanotechnology

Volumn 21, Issue 15, 2010, Pages

  Noh, Jong Wook ^a   Anderson, Ryan R ^a   Kim, Seunghyun ^a   Hu, Weisheng ^a   Nordin, Gregory P ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE-STEP; ENHANCED SENSITIVITY; FREE END; IN-PLANE; MEASUREMENT BANDWIDTH; MICRO-CANTILEVERS; MICRO-SCALES; MICROCANTILEVER ARRAYS; MINIMUM DETECTABLE DEFLECTIONS; MODE STRUCTURE; OPTICAL LEVER; ORDERS OF MAGNITUDE; PIEZO-RESISTIVE; RIB WAVEGUIDES; SENSITIVITY ENHANCEMENTS; STATIC DEFLECTIONS;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; WAVEGUIDES;

BACTERIOPHAGES;

EID: 77949877280     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/15/155501     Document Type: Article

References (16)

1. Raiteri R, Grattarola M and Berger R 2002 Micromechanics senses biomolecules Mater. Today 5 22-9
2. Lavrik N V, Sepaniak M J and Datskos P G 2004 Cantilever transducers as a platform for chemical and biological sensors Rev. Sci. Instrum. 75 2229-53
3. Goeders K M, Colton J S and Bottomley L A 2008 Microcantilevers: sensing chemical interactions via mechanical motion Chem. Rev. 108 522-42
4. Schäffer T E and Hansma P K 1998 Characterization and optimization of the detection sensitivity of an atomic force microscope for small cantilevers J. Appl. Phys. 84 4661-6
5. Kocabas C and Aydinli A 2005 Design and analysis of an integrated optical sensor for scanning force microscopies IEEE Sensors J. 5 411-8
6. Gunter R L, Zhine R, Delinger W G, Manygoats K, Kooser A and Porter T L 2004 Investigation of DNA sensing using piezoresistive microcantilever probes IEEE Sensors J. 4 430-3
7. Yu X, Tang Y, Zhang H, Li T and Wang W 2007 Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits IEEE Sensors J. 7 489-95
8. Waggoner P S and Craighead H G 2007 Micro- and nanomechanical sensors for environmental, chemical, and biological detection Lab Chip 7 1238-55
9. Li M, Tang H X and Roukes M L 2007 Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications Nat. Nano 2 114-20
10. Li M, Pernice W H P and Tang H X 2009 Broadband all-photonic transduction of nanocantilevers Nat. Nano 4 377-82
11. Anetsberger G, Arcizet O, Unterreithmeier Q P, Riviere R, Schliesser A, Weig E M, Kotthaus J P and Kippenberg T J 2009 Near-field cavity optomechanics with nanomechanical oscillators Nat. Phys. 5 909-14
12. Eichenfield M, Chan J, Camacho R M, Vahala K J and Painter O 2009 A picrogram- and nanometre-scale photonic-crystal optomechanical cavity Nature 462 78-82
13. Noh J W, Anderson R, Kim S, Cardenas J and Nordin G P 2008 In-plane photonic transduction of silicon-on-insulator microcantilevers Opt. Express 16 12114-23
14. Hu W, Anderson R, Qian Y, Song J, Noh J W, Kim S and Nordin G P 2009 Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method Rev. Sci. Instrum. 80 085101
15. Noh J W, Anderson R R, Kim S, Hu W and Nordin G P 2009 In-plane all-photonic transduction with differential splitter using double-step rib waveguide for photonic microcantilever arrays Opt. Express 17 20012-20
16. Qian Y, Song J, Kim S, Hu W and Nordin G P 2008 Compact waveguide splitter networks Opt. Express 16 4981-90