Low temperature growth of highly crystallized ZnO:Al films by ultrasonic spray pyrolysis from acetylacetone salt

Materials Science and Engineering: B

Volumn 167, Issue 3, 2010, Pages 182-186

  Xu, Jiwen ^a   Wang, Hua ^a   Yang, Ling ^a   Jiang, Minghong ^a   Wei, Shuai ^a   Zhang, Tingting ^a  

^a GUILIN UNIVERSITY OF ELECTRONIC TECHNOLOGY   (China)

Author keywords

Acetylacetonate; AZO films; Sheet resistance; Transmittance; Ultrasonic spray pyrolysis

Indexed keywords

ACETONE; ALUMINUM; ANNEALING; II-VI SEMICONDUCTORS; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; SEMICONDUCTOR DOPING; SPRAY PYROLYSIS; TEMPERATURE; ZINC OXIDE;

ACETYLACETONATES; ACETYLACETONE; AS-DEPOSITED FILMS; AZO FILMS; HIGH QUALITY; LOW TEMPERATURE GROWTH; TRANSMITTANCE; ULTRASONIC SPRAY PYROLYSIS; VACUUM-ANNEALING; ZNO:AL FILMS;

GLASS SUBSTRATES;

EID: 77949490971     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2010.02.012     Document Type: Article

References (24)

1. Gordon R.G. MRS Bull. 25 (2000) 52
2. Minami T. MRS Bull. 25 (2000) 38
3. An K.S., Cho W., Lee B.K., Lee S.S., and Kim C.G. J. Nanosci. Nanotechnol. 8 (2008) 4856
4. Chen M., Pei Z.L., Sun C., Wen L.S., and Wang X. J. Cryst. Growth 220 (2000) 254
5. Dimova-Malinovska D., Tzenov N., Tzolov M., and Vassilev L. Mater. Sci. Eng. B 52 (1998) 59
6. Volintiru I., Creatore M., Kniknie B.J., Spee C.I.M.A., and van de Sanden M.C.M. J. Appl. Phys. 102 (2007) 043709-1
7. Tang W., and Cameron D.C. Thin Solid Films 238 (1994) 83
8. Mass J., Bhattacharya P., and Katiyar R.S. Mater. Sci. Eng. B 103 (2003) 9
9. Hou X., and Choy K.L. Chem. Vapor Depos. 12 (2006) 583
10. Djelloul A., Bouzid K., and Guerrab F. Turk. J. Phys. 32 (2008) 49
11. Ramakrishna Reddy K.T., Reddy T.B.S., Forbes I., and Miles R.W. Surf. Coat. Technol. 151-152 (2002) 110
12. Lee J.H., and Park B.O. Mater. Sci. Eng. B 106 (2004) 242
13. Wienke J., and Booij A.S. Thin Solid Films 516 (2008) 4508
14. Mondragon-Suarez H., Maldonado A., de la M., Olvera L., Reyes A., Castanedo-Perez R., Torres-Delgado G., and Asomoza R. Appl. Surf. Sci. 193 (2002) 52
15. Nishinaka H., Kawaharamura T., and Fujita S. Jpn. J. Appl. Phys. 46 (2007) 6811
16. Islam M.N., Ghosh T.B., Chopra K.L., and Acharya H.N. Thin Solid Films 280 (1996) 20
17. Lin S.S., Huang J.L., and Sajgalik P. Surf. Coat. Technol. 190 (2005) 39
18. Barret C.S., and Massalski T.B. Structure of Metals (1980), Pergamon Press, Oxford
19. Ma T.Y., and Lee S.C. J. Mater. Sci.-Mater. Electron. 11 (2000) 305
20. Bouzid K., Djelloul A., Bouzid N., and Bougdira J. Phys. Status Solidi (a) 206 (2008) 106
21. Look D.C., Coskun C., Claflin B., and Farlow G.C. Physica B 340-342 (2003) 32
22. Tahar R.B.H. J. Eur. Ceram. Soc. 25 (2005) 3301
23. Alam M.J., and Cameron D.C. J. Vac. Sci. Technol. A 19 (2001) 1642
24. Yang Y.A., Wei Y.B., Loo B.H., and Yao J.N. J. Electroanal. Chem. 462 (1999) 259