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Volumn 27, Issue 4, 2004, Pages 668-675
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A procedure for validating the finite element model of a piezoresistive ceramic pressure sensor
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Author keywords
Ceramic pressure sensors (CPSs); Device under test (DUT); Finite element (FE) model
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Indexed keywords
COMPUTER SIMULATION;
DESIGN FOR TESTABILITY;
ELECTROMECHANICAL DEVICES;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
NUMERICAL ANALYSIS;
RELIABILITY;
RESISTORS;
SENSORS;
THICK FILM DEVICES;
CERAMIC PRESSURE SENSORS (CPSS);
DEVICE UNDER TEST (DUT);
ELECTROMECHANICAL CHARACTERIZATION;
PIEZORESISTIVE SENSORS;
THICK FILM RESISTORS;
CERAMIC MATERIALS;
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EID: 10244232785
PISSN: 15213331
EISSN: None
Source Type: Journal
DOI: 10.1109/TCAPT.2004.838869 Document Type: Article |
Times cited : (14)
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References (7)
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