SCOPUS 정보 검색 플랫폼

Volumn 107, Issue 4, 2010, Pages

Nitridation behavior of sapphire using a carbon-saturated N2 -CO gas mixture

(7) Fukuyama, Hiroyuki a Nakamura, Katsuhito a Aikawa, Toshiaki a Kobatake, Hidekazu a Hakomori, Akira b Takada, Kazuya b Hiraga, Kenji c

a TOHOKU UNIVERSITY (Japan)

b TOKUYAMA CORPORATION (Japan)

c TOHOKU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; ALN FILMS; CO GAS MIXTURE; CRYSTAL QUALITIES; DIFFUSION MODEL; DIFFUSION PROCESS; HIGH QUALITY; III-NITRIDE; INTERFACIAL PHENOMENA; NITRIDATION PROCESS; NITRIDATION TIME; PLANE SAPPHIRE; SAPPHIRE NITRIDATION; THERMAL DECOMPOSITIONS;

GAS MIXTURES; MAGNETIC FILMS; NITRIDATION; NITRIDES; OPTOELECTRONIC DEVICES; PYROLYSIS; SAPPHIRE; THERMOGRAVIMETRIC ANALYSIS;

FILM GROWTH;

EID: 77749280167 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3272692 Document Type: Article

Times cited : (35)

References (14)

1
- 0142095011
- 0022-0248. 10.1016/j.jcrysgro.2003.07.026
- W. Nakao and H. Fukuyama, J. Cryst. Growth 0022-0248 259, 302 (2003). 10.1016/j.jcrysgro.2003.07.026
- (2003) J. Cryst. Growth , vol.259 , pp. 302
- Nakao, W.¹ Fukuyama, H.²

2
- 33746846901
- 3
- DOI 10.1063/1.2214217
- H. Fukuyama, S. Kusunoki, A. Hakomori, and K. Hiraga, J. Appl. Phys. 0021-8979 100, 024905 (2006). 10.1063/1.2214217 (Pubitemid 44179620)
- (2006) Journal of Applied Physics , vol.100 , Issue.2 , pp. 024905
- Fukuyama, H.¹ Kusunoki, S.-Y.² Hakomori, A.³ Hiraga, K.⁴

3
- 34347344893
- Improvement of AlN crystalline quality with high epitaxial growth rates by hydride vapor phase epitaxy
- DOI 10.1016/j.jcrysgro.2007.04.001, PII S0022024807003752
- T. Nagashima, M. Harada, H. Yanagia, H. Fukuyama, Y. Kumagai, A. Koukitu, and K. Takada, J. Cryst. Growth 0022-0248 305, 355 (2007). 10.1016/j.jcrysgro. 2007.04.001 (Pubitemid 47016516)
- (2007) Journal of Crystal Growth , vol.305 , Issue.SPEC. ISS. , pp. 355-359
- Nagashima, T.¹ Harada, M.² Yanagi, H.³ Fukuyama, H.⁴ Kumagai, Y.⁵ Koukitu, A.⁶ Takada, K.⁷

4
- 0036545237
- 0002-7820
- W. Nakao, H. Fukuyama, and K. Nagata, J. Am. Ceram. Soc. 0002-7820 85, 889 (2002).
- (2002) J. Am. Ceram. Soc. , vol.85 , pp. 889
- Nakao, W.¹ Fukuyama, H.² Nagata, K.³

5
- 0037324017
- 0013-4651. 10.1149/1.1537757
- W. Nakao, H. Fukuyama, and K. Nagata, J. Electrochem. Soc. 0013-4651 150, J1 (2003). 10.1149/1.1537757
- (2003) J. Electrochem. Soc. , vol.150 , pp. 1
- Nakao, W.¹ Fukuyama, H.² Nagata, K.³

6
- 33745326147
- Gibbs energy change of carbothermal nitridation reaction of γ-AlON and its thermodynamic stability
- DOI 10.1111/j.1551-2916.2005.00565.x
- W. Nakao and H. Fukuyama, J. Am. Ceram. Soc. 0002-7820 88, 3170 (2005). 10.1111/j.1551-2916.2005.00565.x (Pubitemid 43934093)
- (2005) Journal of the American Ceramic Society , vol.88 , Issue.11 , pp. 3170-3176
- Nakao, W.¹ Fukuyama, H.²

7
- 33845951713
- 0002-7820. 10.1111/j.1151-2916.1978.tb09336.x
- J. W. McCauly, J. Am. Ceram. Soc. 0002-7820 61, 372 (1978). 10.1111/j.1151-2916.1978.tb09336.x
- (1978) J. Am. Ceram. Soc. , vol.61 , pp. 372
- McCauly, J.W.¹

8
- 35848953179
- 4th ed., edited by M. W. Chase, Jr. (National Institute of Standards and Technology, Gaithersburg, MD)
- NIST-JANAF Thermochemical Tables, 4th ed., edited by, M. W. Chase, Jr., (National Institute of Standards and Technology, Gaithersburg, MD, 1998).
- (1998) NIST-JANAF Thermochemical Tables

9
- 84956227761
- 0013-4651. 10.1149/1.2407853
- H. M. Manasevit, F. M. Erdmann, and W. I. Simpson, J. Electrochem. Soc. 0013-4651 118, 1864 (1971). 10.1149/1.2407853
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1864
- Manasevit, H.M.¹ Erdmann, F.M.² Simpson, W.I.³

10
- 33846442038
- Threading dislocations in heteroepitaxial AlN layer grown by MOVPE on SiC (0 0 0 1) substrate
- DOI 10.1016/j.jcrysgro.2006.10.032, PII S0022024806009924
- Y. Taniyasu, M. Kasu, and T. Makimoto, J. Cryst. Growth 0022-0248 298, 310 (2007). 10.1016/j.jcrysgro.2006.10.032 (Pubitemid 46149684)
- (2007) Journal of Crystal Growth , vol.298 , Issue.SPEC. ISS , pp. 310-315
- Taniyasu, Y.¹ Kasu, M.² Makimoto, T.³

11
- 21544463767
- 0001-6160. 10.1016/0001-6160(53)90106-0
- P. Gay, P. B. Hirsch, and A. Kelly, Acta Metall. 0001-6160 1, 315 (1953). 10.1016/0001-6160(53)90106-0
- (1953) Acta Metall. , vol.1 , pp. 315
- Gay, P.¹ Hirsch, P.B.² Kelly, A.³

12
- 0032056159
- 0141-8610
- T. Metzger, R. Höpler, E. Born, O. Ambacher, M. Stutzmann, R. Stömmer, M. Schuster, H. Göbel, S. Christiansen, M. Albrecht, and H. P. Strunk, Philos. Mag. A 0141-8610 77, 1013 (1998).
- (1998) Philos. Mag. A , vol.77 , pp. 1013
- Metzger, T.¹ Höpler, R.² Born, E.³ Ambacher, O.⁴ Stutzmann, M.⁵ Stömmer, R.⁶ Schuster, M.⁷ Göbel, H.⁸ Christiansen, S.⁹ Albrecht, M.¹⁰ Strunk, H.P.¹¹

13
- 49749207818
- 0001-6160. 10.1016/0001-6160(57)90122-0
- C. G. Dunn and E. F. Koch, Acta Metall. 0001-6160 5, 548 (1957). 10.1016/0001-6160(57)90122-0
- (1957) Acta Metall. , vol.5 , pp. 548
- Dunn, C.G.¹ Koch, E.F.²

14
- 0001666951
- 0163-1829. 10.1103/PhysRevB.54.16676
- T. Mattila and R. M. Nieminen, Phys. Rev. B 0163-1829 54, 16676 (1996). 10.1103/PhysRevB.54.16676
- (1996) Phys. Rev. B , vol.54 , pp. 16676
- Mattila, T.¹ Nieminen, R.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.