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Volumn 10, Issue 3, 2010, Pages 572-577

Development of a mems-scale photoacoustic chemical sensor using a quantum cascade laser

Author keywords

Microelectromechanical system (MEMS); Photoacoustic spectroscopy (PAS); Quantum cascade laser (QCL); Sensor

Indexed keywords

CONTINUOUS WAVE; DETECTION LEVELS; DETECTION LIMITS; DIMETHYL METHYLPHOSPHONATE; IR SPECTRUM; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEM (MEMS); MICROELECTROMECHANICAL SYSTEMS; NERVE GAS; PARTS-PER-BILLION; PHOTOACOUSTIC SENSORS; QUANTUM CASCADE LASER (QCL);

EID: 77649138546     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2038665     Document Type: Article
Times cited : (55)

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